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Business Segment, Geographic Area, Product and Significant Customer Information - Customers with Net Revenues Greater than 10% of Total Net Revenues (Detail) (Customer Concentration Risk [Member], Sales Revenue, Net [Member])	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Applied Materials Inc [Member]
Revenue, Major Customer [Line Items]
Applied Materials, Inc.	19.10%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_AppliedMaterialsIncMember	17.00%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_AppliedMaterialsIncMember	14.50%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_AppliedMaterialsIncMember
Lam Research Corporation [Member]
Revenue, Major Customer [Line Items]
Applied Materials, Inc.	12.90%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_LamResearchCorporationMember	12.30%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_LamResearchCorporationMember	10.10%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_LamResearchCorporationMember

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- Definition

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 825

-SubTopic 10

-Section 50

-Paragraph 21

-Subparagraph (a)

-URI http://asc.fasb.org/extlink&oid=35750535&loc=d3e13537-108611



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 275

-SubTopic 10

-Section 50

-Paragraph 20

-URI http://asc.fasb.org/extlink&oid=6927468&loc=d3e6404-108592



Reference 3: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 825

-SubTopic 10

-Section 50

-Paragraph 20

-URI http://asc.fasb.org/extlink&oid=35750535&loc=d3e13531-108611



Reference 4: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 275

-SubTopic 10

-Section 50

-Paragraph 18

-URI http://asc.fasb.org/extlink&oid=6927468&loc=d3e6351-108592

+ Details

Name:	us-gaap_ConcentrationRiskPercentage1
Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

X

- Details

Name:	us-gaap_EntityWideRevenueMajorCustomerLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration