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Investments - Fair Value of Short-Term Available-for-Sale and Trading Investments (Detail) (USD $)
In Thousands, unless otherwise specified
Dec. 31, 2014
Dec. 31, 2013
Schedule of Investments [Line Items]    
Fair value of short-term available-for-sale investments $ 129,594us-gaap_AvailableForSaleSecuritiesCurrent $ 299,715us-gaap_AvailableForSaleSecuritiesCurrent
Fair value of short-term securities 129,594us-gaap_ShortTermInvestments 300,715us-gaap_ShortTermInvestments
Time Deposits and Certificates of Deposit [Member]    
Schedule of Investments [Line Items]    
Fair value of short-term available-for-sale investments 20,900us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
64,989us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
Bankers Acceptance Drafts [Member]    
Schedule of Investments [Line Items]    
Fair value of short-term available-for-sale investments 82us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= us-gaap_BankersAcceptanceMember
491us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= us-gaap_BankersAcceptanceMember
Commercial Paper [Member]    
Schedule of Investments [Line Items]    
Fair value of short-term available-for-sale investments   53,434us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= us-gaap_CommercialPaperMember
Corporate Obligations [Member]    
Schedule of Investments [Line Items]    
Fair value of short-term available-for-sale investments 24,020us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= mksi_CorporateObligationsMember
18,351us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= mksi_CorporateObligationsMember
Municipal Bonds [Member]    
Schedule of Investments [Line Items]    
Fair value of short-term available-for-sale investments 2,099us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= us-gaap_MunicipalBondsMember
 
U.S. Agency Obligations [Member]    
Schedule of Investments [Line Items]    
Fair value of short-term available-for-sale investments 82,493us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
162,450us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_InvestmentTypeAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
Mutual Funds [Member]    
Schedule of Investments [Line Items]    
Fair value of short-term securities   $ 1,000us-gaap_TradingSecurities
/ us-gaap_InvestmentTypeAxis
= us-gaap_EquityFundsMember