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Consolidated Statements of Cash Flows (USD $)
In Thousands, unless otherwise specified
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Cash flows from operating activities:      
Net income $ 115,778us-gaap_NetIncomeLoss $ 35,776us-gaap_NetIncomeLoss $ 48,029us-gaap_NetIncomeLoss
Adjustments to reconcile net income to net cash provided by operating activities:      
Depreciation and amortization 20,514us-gaap_DepreciationAndAmortization 17,102us-gaap_DepreciationAndAmortization 14,442us-gaap_DepreciationAndAmortization
Stock-based compensation 11,315us-gaap_ShareBasedCompensation 13,992us-gaap_ShareBasedCompensation 13,031us-gaap_ShareBasedCompensation
Provision for excess and obsolete inventory 12,131us-gaap_InventoryWriteDown 21,671us-gaap_InventoryWriteDown 15,028us-gaap_InventoryWriteDown
Provision for doubtful accounts 668us-gaap_ProvisionForDoubtfulAccounts 631us-gaap_ProvisionForDoubtfulAccounts 888us-gaap_ProvisionForDoubtfulAccounts
Deferred income taxes 5,264us-gaap_DeferredIncomeTaxExpenseBenefit (3,089)us-gaap_DeferredIncomeTaxExpenseBenefit 3,819us-gaap_DeferredIncomeTaxExpenseBenefit
Excess tax benefits from stock-based compensation (447)us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities (935)us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities (2,105)us-gaap_ExcessTaxBenefitFromShareBasedCompensationOperatingActivities
Other 139us-gaap_OtherNoncashIncomeExpense 200us-gaap_OtherNoncashIncomeExpense 41us-gaap_OtherNoncashIncomeExpense
Changes in operating assets and liabilities:      
Trade accounts receivable 6,103us-gaap_IncreaseDecreaseInAccountsReceivable (36,153)us-gaap_IncreaseDecreaseInAccountsReceivable 38,288us-gaap_IncreaseDecreaseInAccountsReceivable
Inventories (20,910)us-gaap_IncreaseDecreaseInInventories (29,797)us-gaap_IncreaseDecreaseInInventories 5,341us-gaap_IncreaseDecreaseInInventories
Income taxes (32,744)us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable 24,441us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable (3,126)us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable
Other current and non-current assets (325)us-gaap_IncreaseDecreaseInOtherOperatingAssets 1,355us-gaap_IncreaseDecreaseInOtherOperatingAssets 7,689us-gaap_IncreaseDecreaseInOtherOperatingAssets
Accrued compensation (13,563)us-gaap_IncreaseDecreaseInAccruedSalaries 13,677us-gaap_IncreaseDecreaseInAccruedSalaries 2,759us-gaap_IncreaseDecreaseInAccruedSalaries
Other current and non-current liabilities 3,469us-gaap_IncreaseDecreaseInOtherOperatingLiabilities (5,956)us-gaap_IncreaseDecreaseInOtherOperatingLiabilities 1,324us-gaap_IncreaseDecreaseInOtherOperatingLiabilities
Accounts payable (5,478)us-gaap_IncreaseDecreaseInAccountsPayableTrade 23,172us-gaap_IncreaseDecreaseInAccountsPayableTrade (8,281)us-gaap_IncreaseDecreaseInAccountsPayableTrade
Net cash provided by operating activities 101,914us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations 76,087us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations 137,167us-gaap_NetCashProvidedByUsedInOperatingActivitiesContinuingOperations
Cash flows from investing activities:      
Acquisition of business, net of cash acquired (86,950)us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired (2,326)us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired (22,607)us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
Purchases of investments (360,813)us-gaap_PaymentsToAcquireInvestments (550,076)us-gaap_PaymentsToAcquireInvestments (435,961)us-gaap_PaymentsToAcquireInvestments
Maturities of investments 249,359us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities 417,566us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities 313,298us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities
Sales of investments 185,186us-gaap_ProceedsFromSaleOfAvailableForSaleSecurities 110,928us-gaap_ProceedsFromSaleOfAvailableForSaleSecurities 46,559us-gaap_ProceedsFromSaleOfAvailableForSaleSecurities
Purchases of property, plant and equipment (13,183)us-gaap_PaymentsToAcquirePropertyPlantAndEquipment (12,410)us-gaap_PaymentsToAcquirePropertyPlantAndEquipment (17,705)us-gaap_PaymentsToAcquirePropertyPlantAndEquipment
Other 1,593us-gaap_PaymentsForProceedsFromOtherInvestingActivities (216)us-gaap_PaymentsForProceedsFromOtherInvestingActivities (1,451)us-gaap_PaymentsForProceedsFromOtherInvestingActivities
Net cash used in investing activities (24,808)us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations (36,534)us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations (117,867)us-gaap_NetCashProvidedByUsedInInvestingActivitiesContinuingOperations
Cash flows from financing activities:      
Proceeds from short-term borrowings   6us-gaap_ProceedsFromShortTermDebt 2,896us-gaap_ProceedsFromShortTermDebt
Payments on short-term borrowings   (776)us-gaap_RepaymentsOfShortTermDebt (9,348)us-gaap_RepaymentsOfShortTermDebt
Repurchases of common stock (20,809)us-gaap_PaymentsForRepurchaseOfCommonStock (2,875)us-gaap_PaymentsForRepurchaseOfCommonStock (11,501)us-gaap_PaymentsForRepurchaseOfCommonStock
Net proceeds related to employee stock awards 2,492mksi_ProceedsFromPaymentsForEmployeeStockAwards (464)mksi_ProceedsFromPaymentsForEmployeeStockAwards 1,564mksi_ProceedsFromPaymentsForEmployeeStockAwards
Dividend payments (34,851)us-gaap_PaymentsOfDividendsCommonStock (33,975)us-gaap_PaymentsOfDividendsCommonStock (32,686)us-gaap_PaymentsOfDividendsCommonStock
Excess tax benefit from stock-based compensation 447us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities 935us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities 2,105us-gaap_ExcessTaxBenefitFromShareBasedCompensationFinancingActivities
Net cash used in financing activities (52,721)us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperations (37,149)us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperations (46,970)us-gaap_NetCashProvidedByUsedInFinancingActivitiesContinuingOperations
Effect of exchange rate changes on cash and cash equivalents (7,850)us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents (1,090)us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents 2,342us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents
Increase (decrease) in cash and cash equivalents 16,535us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease 1,314us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease (25,328)us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease
Cash and cash equivalents at beginning of year 288,902us-gaap_CashAndCashEquivalentsAtCarryingValue 287,588us-gaap_CashAndCashEquivalentsAtCarryingValue 312,916us-gaap_CashAndCashEquivalentsAtCarryingValue
Cash and cash equivalents at end of year 305,437us-gaap_CashAndCashEquivalentsAtCarryingValue 288,902us-gaap_CashAndCashEquivalentsAtCarryingValue 287,588us-gaap_CashAndCashEquivalentsAtCarryingValue
Cash paid during the period for:      
Interest 44us-gaap_InterestPaid 60us-gaap_InterestPaid 212us-gaap_InterestPaid
Income taxes $ 47,948us-gaap_IncomeTaxesPaid $ 11,878us-gaap_IncomeTaxesPaid $ 18,335us-gaap_IncomeTaxesPaid