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Goodwill and Intangible Assets - Goodwill Associated with Reportable Segments (Detail) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting Information [Line Items]
Goodwill	$ 192,381us-gaap_Goodwill	$ 150,909us-gaap_Goodwill	$ 150,733us-gaap_Goodwill
Advanced Manufacturing Capital Equipment [Member]
Segment Reporting Information [Line Items]
Goodwill	184,234us-gaap_Goodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember	142,065us-gaap_Goodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember
Analytical Solutions Group [Member]
Segment Reporting Information [Line Items]
Goodwill	8,668us-gaap_Goodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember	8,668us-gaap_Goodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember
Foreign Currency Translation [Member]
Segment Reporting Information [Line Items]
Goodwill	$ (521)us-gaap_Goodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_ForeignCurrencyTranslationMember	$ 176us-gaap_Goodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_ForeignCurrencyTranslationMember

X

- Definition

Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 45

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=6388280&loc=d3e13770-109266

+ Details

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Namespace Prefix:	us-gaap_
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Balance Type:	debit
Period Type:	instant

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- Details

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- Details

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X

- Details

Name:	us-gaap_StatementBusinessSegmentsAxis=mksi_AnalyticalSolutionsGroupMember
Namespace Prefix:
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Period Type:

X

- Details

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Namespace Prefix:
Data Type:	na
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