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Income Taxes - Reconciliation of Company's Effective Tax Rate to U.S. Federal Statutory Rate (Detail)	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Income Tax Disclosure [Abstract]
U.S. Federal income tax statutory rate	35.00%us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	35.00%us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate	35.00%us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate
Federal tax credits	(1.00%)us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits	(1.80%)us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits
State income taxes, net of federal benefit	2.00%us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes	1.30%us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes	1.30%us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes
Effect of foreign operations taxed at various rates	(7.30%)us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential	0.30%us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential	(2.60%)us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential
Qualified production activity tax benefit	(1.80%)us-gaap_EffectiveIncomeTaxRateReconciliationDeductionsQualifiedProductionActivities	(1.40%)us-gaap_EffectiveIncomeTaxRateReconciliationDeductionsQualifiedProductionActivities	(0.50%)us-gaap_EffectiveIncomeTaxRateReconciliationDeductionsQualifiedProductionActivities
Deferred tax asset valuation allowance	(0.50%)us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance	(0.70%)us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance	1.40%us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance
Release of income tax reserves (including interest)	(10.70%)mksi_EffectiveIncomeTaxRateReconciliationReleaseOfIncomeTaxReserves
Foreign tax credits in excess of taxes on foreign dividends	(1.00%)mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditsInExcessOfTaxesOnForeignDividends
Income tax charges on accumulated foreign earnings		10.90%mksi_EffectiveIncomeTaxRateReconciliationTaxOnForeignEarnings
Tax benefit related to reinstatement of tax incentives		(4.00%)mksi_EffectiveIncomeTaxRateReconciliationTaxIncentives
Other	0.40%us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments	0.10%us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments	1.50%us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments
Total	15.10%us-gaap_EffectiveIncomeTaxRateContinuingOperations	39.70%us-gaap_EffectiveIncomeTaxRateContinuingOperations	36.10%us-gaap_EffectiveIncomeTaxRateContinuingOperations

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Effective Income Tax Rate Reconciliation Foreign Tax Credits In Excess of Taxes on Foreign Dividends

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Effective Income Tax Rate Reconciliation Release of Income Tax Reserves

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Effective income tax rate reconciliation tax incentives.

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Effective income tax rate reconciliation tax on foreign earnings.

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Percentage of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.

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Percentage of domestic federal statutory tax rate applicable to pretax income (loss).

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Percentage of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to tax credits. Including, but not limited to, research credit, foreign tax credit, investment tax credit, and other tax credits.

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