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Stock-Based Compensation - Additional Information (Detail) (USD $)
12 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Common Stock, shares issued 53,154,666us-gaap_CommonStockSharesIssued 53,363,450us-gaap_CommonStockSharesIssued  
Vesting period 3 years    
Weighted average remaining contractual life of options exercisable 10 months 6 days    
Closing stock price per share $ 36.60mksi_ClosingStockPricePerShare    
Number of in-the-money options exercisable 30,224us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber    
Tax effect from stock-based plans $ 331,000us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation $ 495,000us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation $ 1,862,000us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation
Capitalization of share based payment costs 471,000us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsCapitalizedAmount 471,000us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsCapitalizedAmount  
Options granted 0us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod 0us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod 0us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod
Total intrinsic value of options exercised 958,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue 684,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue 1,228,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
Weighted average fair value per share of employee stock purchase plan rights, granted $ 6.37us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue $ 5.76us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue $ 7.24us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
Total intrinsic value of options exercised and fair value of options vested 12,106,000us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1 19,221,000us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1 16,498,000us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1
RSUs Granted to Directors [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Share based compensation arrangement by share based payment award vesting period description Earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of an acquisition.    
Restricted Stock Units (RSUs) [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Weighted average fair value per share of employee stock purchase plan rights, granted $ 29.44us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockUnitsRSUMember
   
Unrecognized compensation cost 11,618,000us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
/ us-gaap_AwardTypeAxis
= us-gaap_RestrictedStockUnitsRSUMember
   
Estimated weighted average amortization period 1 year 3 months 7 days    
Restricted Stock Units (RSUs) [Member] | Maximum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Vesting period 13 months    
Restricted Stock Units (RSUs) [Member] | Minimum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Vesting period 1 day    
Employee Stock Purchase Plan - Third Amended and Restated [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Shares authorized for issuance 1,950,000us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
   
Percentage of payroll deduction to compensation Up to 10%    
Percentage of Common Stock through payroll deductions 10.00%mksi_MaximumPercentageOfPayrollForPurchaseOfStock
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
   
Percentage of closing price of the Common Stock 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
   
Common Stock, shares issued 69,474us-gaap_CommonStockSharesIssued
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
138,674us-gaap_CommonStockSharesIssued
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
 
Employee Stock Purchase Plan - Third Amended and Restated [Member] | Offer Terminate [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Percentage of closing price of the Common Stock 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= mksi_OfferTerminateMember
   
Employee Stock Purchase Plan - Third Amended and Restated [Member] | Maximum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Amount of payroll deduction 21,250mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MaximumMember
   
Common stock, exercise price $ 24.52mksi_CommonStockExercisePrice
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MaximumMember
$ 20.42mksi_CommonStockExercisePrice
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MaximumMember
 
Employee Stock Purchase Plan - Third Amended and Restated [Member] | Minimum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Common stock, exercise price   $ 23.96mksi_CommonStockExercisePrice
/ us-gaap_PlanNameAxis
= mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MinimumMember
 
Employee Stock Purchase Plan - Second Amended and Restated [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Shares authorized for issuance 400,000us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
   
Percentage of Common Stock through payroll deductions 10.00%mksi_MaximumPercentageOfPayrollForPurchaseOfStock
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
   
Percentage of closing price of the Common Stock 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
   
Common Stock, shares issued 20,053us-gaap_CommonStockSharesIssued
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
33,929us-gaap_CommonStockSharesIssued
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
 
Employee Stock Purchase Plan - Second Amended and Restated [Member] | Offer Terminate [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Percentage of closing price of the Common Stock 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= mksi_OfferTerminateMember
   
Employee Stock Purchase Plan - Second Amended and Restated [Member] | Maximum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Amount of payroll deduction 21,250mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MaximumMember
   
Common stock, exercise price $ 24.52mksi_CommonStockExercisePrice
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MaximumMember
   
Employee Stock Purchase Plan - Second Amended and Restated [Member] | Minimum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Common stock, exercise price $ 20.42mksi_CommonStockExercisePrice
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MinimumMember
$ 23.96mksi_CommonStockExercisePrice
/ us-gaap_PlanNameAxis
= mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
/ us-gaap_RangeAxis
= us-gaap_MinimumMember
 
2014 ESPP Plan [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Shares authorized for issuance 2,500,000us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
   
Percentage of payroll deduction to compensation Up to 10%    
Percentage of Common Stock through payroll deductions 10.00%mksi_MaximumPercentageOfPayrollForPurchaseOfStock
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
   
Amount of payroll deduction 21,250mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
   
Percentage of closing price of the Common Stock 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
   
Common Stock, shares issued 82,481us-gaap_CommonStockSharesIssued
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
   
Common stock, exercise price $ 24.33mksi_CommonStockExercisePrice
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
   
Shares reserved for future issuance 2,417,519us-gaap_CommonStockCapitalSharesReservedForFutureIssuance
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
   
2014 ESPP Plan [Member] | Offer Terminate [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Percentage of closing price of the Common Stock 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
/ us-gaap_PlanNameAxis
= mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
/ us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis
= mksi_OfferTerminateMember
   
Stock Incentive Plan 2014 [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Shares reserved for future issuance 17,876,234us-gaap_CommonStockCapitalSharesReservedForFutureIssuance
/ us-gaap_PlanNameAxis
= mksi_StockIncentivePlanTwoThousandFourteenMember
   
Shares available for future grant 18,000,000us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
/ us-gaap_PlanNameAxis
= mksi_StockIncentivePlanTwoThousandFourteenMember
   
Percentage of exercise price fair value option grant in period 100.00%mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice
/ us-gaap_PlanNameAxis
= mksi_StockIncentivePlanTwoThousandFourteenMember
   
Number of shares returned for each common stock 2.4mksi_NumberOfSharesReturnedForEachShareOfCommonStock
/ us-gaap_PlanNameAxis
= mksi_StockIncentivePlanTwoThousandFourteenMember
   
Stock Incentive Plans 2001 and After [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Percentage of exercise price fair value option grant in period 100.00%mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice
/ us-gaap_PlanNameAxis
= mksi_StockIncentivePlan2001Member
   
Stock options granted to employees under plans prior to 2001, vested after one year 25.00%us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage
/ us-gaap_PlanNameAxis
= mksi_StockIncentivePlan2001Member
   
Stock options granted to employees under plans prior to 2001, vested per quarter thereafter 6.25%mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPercentageMaximumPerQuarter
/ us-gaap_PlanNameAxis
= mksi_StockIncentivePlan2001Member
   
Stock options expired 10 years    
1997 Director Plan [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Share based compensation arrangement by share based payment award vesting period description Options granted to directors generally vested at the earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of an acquisition.    
1997 Director Plan [Member] | Maximum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Vesting period 13 months    
1997 Director Plan [Member] | Minimum [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Vesting period 1 day    
Restricted Stock Units (RSUs) [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Stock options granted to employees under plans prior to 2001, vested after one year 33.30%us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage
/ us-gaap_PlanNameAxis
= us-gaap_RestrictedStockUnitsRSUMember
33.30%us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage
/ us-gaap_PlanNameAxis
= us-gaap_RestrictedStockUnitsRSUMember
 
Stock options expired 3 years    
RSUs Granted to Employees [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Share based compensation arrangement by share based payment award vesting period description Employees who are at least 60 years old and have a combined years of age plus Years of Service (as defined in the applicable RSU agreement) equal to 70 years or more are expensed immediately.    
Employee Stock Option [Member]      
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]      
Cash received from employees as a result of employee stock option exercises 1,605,000us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions
/ us-gaap_OptionIndexedToIssuersEquityTypeAxis
= us-gaap_EmployeeStockOptionMember
1,869,000us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions
/ us-gaap_OptionIndexedToIssuersEquityTypeAxis
= us-gaap_EmployeeStockOptionMember
 
Tax effect from stock-based plans $ 175,000us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation
/ us-gaap_OptionIndexedToIssuersEquityTypeAxis
= us-gaap_EmployeeStockOptionMember
$ 94,000us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation
/ us-gaap_OptionIndexedToIssuersEquityTypeAxis
= us-gaap_EmployeeStockOptionMember