EX-21.1 4 d838776dex211.htm EX-21.1

EX-21.1

EXHIBIT 21.1

SUBSIDIARIES OF THE REGISTRANT

SUBSIDIARY				JURISDICTION OF INCORPORATION
Alter S.r.l.				Italy
ASTeX GmbH				Germany
MKS Denmark ApS				Denmark
MKS German Holding GmbH				Germany
MKS Instruments (Asia) Ltd.				Bermuda
MKS Instruments (China) Company Limited				China
MKS Instruments Deutschland GmbH				Germany
MKS Instruments Holdings Ltd.				United Kingdom
MKS Instruments (Hong Kong) Limited				Hong Kong
MKS Instruments (Shanghai) Limited				China
MKS Instruments (Singapore) Pte. Ltd.				Singapore
MKS Instruments UK.Limited				United Kingdom
MKS Japan, Inc.				Japan
MKS Korea Ltd.				Korea
MKS Luxembourg S.a.r.l.				Luxembourg
MKS Spectra Holdings Limited				United Kingdom
MKS Taiwan Technology Limited				Taiwan
MKS Technology Limited				United Kingdom
MKS Tega Ltd.				Israel
MKS Tenta Products Ltd.				Israel
MKS Umetrics AB				Sweden
Orion Metrology, Inc.				California
Plasmart, Inc.				Korea
Telvac Engineering Limited				United Kingdom
Umetrics, Inc.				New Jersey
Umetrics UK Limited				United Kingdom