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Business Segment, Geographic Area, Product and Significant Customer Information - Worldwide Net Revenue for Each Group of Products (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2014	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Revenue from External Customer [Line Items]
Net sales from product groups	$ 203,021us-gaap_SalesRevenueNet	$ 186,798us-gaap_SalesRevenueNet	$ 184,697us-gaap_SalesRevenueNet	$ 206,353us-gaap_SalesRevenueNet	$ 204,394us-gaap_SalesRevenueNet	$ 166,453us-gaap_SalesRevenueNet	$ 156,928us-gaap_SalesRevenueNet	$ 141,645us-gaap_SalesRevenueNet	$ 780,869us-gaap_SalesRevenueNet	$ 669,420us-gaap_SalesRevenueNet	$ 643,508us-gaap_SalesRevenueNet
Instruments, Control and Vacuum Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									383,863us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_InstrumentsControlAndVacuumProductsMember	341,375us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_InstrumentsControlAndVacuumProductsMember	324,939us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_InstrumentsControlAndVacuumProductsMember
Power and Reactive Gas Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									335,271us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_PowerAndReactiveGasProductsMember	273,357us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_PowerAndReactiveGasProductsMember	251,669us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_PowerAndReactiveGasProductsMember
Analytical Solutions Group Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									$ 61,735us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_AnalyticalSolutionsGroupProductsMember	$ 54,688us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_AnalyticalSolutionsGroupProductsMember	$ 66,900us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_AnalyticalSolutionsGroupProductsMember

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Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 225

-SubTopic 10

-Section S99

-Paragraph 2

-Subparagraph (SX 210.5-03.1)

-URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 03

-Paragraph 1

-Article 5

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