XML 58 R56.htm IDEA: XBRL DOCUMENT v2.4.1.9
Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Detail) (USD $)
In Thousands, unless otherwise specified
Dec. 31, 2014
Dec. 31, 2013
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Derivatives - currency forward contracts $ 1,966us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue $ 920us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
Derivatives - currency forward contracts   656us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
Cash and cash equivalents 167,517us-gaap_CashAndCashEquivalentsFairValueDisclosure 234,675us-gaap_CashAndCashEquivalentsFairValueDisclosure
Short-term investments 129,594us-gaap_ShortTermInvestments 300,715us-gaap_ShortTermInvestments
Available-for-sale securities 129,594us-gaap_AvailableForSaleSecuritiesCurrent 299,715us-gaap_AvailableForSaleSecuritiesCurrent
Other current assets 1,966us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue 920us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
Long-term investments 157,201us-gaap_AvailableForSaleSecuritiesNoncurrent 60,405us-gaap_AvailableForSaleSecuritiesNoncurrent
Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Derivatives - currency forward contracts 2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
920us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total assets 418,828us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
410,638us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Derivatives - currency forward contracts   656us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Cash and cash equivalents 129,923us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
48,598us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Short-term investments 129,594us-gaap_ShortTermInvestments
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
300,715us-gaap_ShortTermInvestments
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current assets 2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
920us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total current assets 261,627mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
350,233mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Long-term investments 157,201us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
60,405us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current liabilities   656us-gaap_OtherLiabilitiesFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Total assets 129,092us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
39,166us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Cash and cash equivalents 129,092us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
38,166us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Short-term investments   1,000us-gaap_ShortTermInvestments
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total current assets 129,092mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
39,166mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Derivatives - currency forward contracts 2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
920us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total assets 289,736us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
371,472us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Derivatives - currency forward contracts   656us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Cash and cash equivalents 831us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
10,432us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Short-term investments 129,594us-gaap_ShortTermInvestments
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
299,715us-gaap_ShortTermInvestments
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current assets 2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
920us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total current assets 132,535mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
311,067mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Long-term investments 157,201us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
60,405us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current liabilities   656us-gaap_OtherLiabilitiesFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Money Market Funds [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 129,092us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
38,166us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Money Market Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 129,092us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
38,166us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Time Deposits and Certificates of Deposit [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents   7,050us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities 20,948us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
65,043us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Time Deposits and Certificates of Deposit [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents   7,050us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities 20,948us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
65,043us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Bankers Acceptance Drafts [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 131us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
32us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities 82us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
491us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Bankers Acceptance Drafts [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 131us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
32us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities 82us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
491us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Commercial Paper [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents   3,350us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_CommercialPaperMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities   53,434us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_CommercialPaperMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Commercial Paper [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents   3,350us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_CommercialPaperMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities   53,434us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_CommercialPaperMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Mutual Funds [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Mutual funds   1,000us-gaap_TradingSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_EquityFundsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Mutual Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Mutual funds   1,000us-gaap_TradingSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_EquityFundsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Corporate Obligations [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 700us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Available-for-sale securities   18,351us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities 88,689us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Corporate Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 700us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Available-for-sale securities   18,351us-gaap_AvailableForSaleSecuritiesCurrent
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities 88,689us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
U.S. Agency Obligations [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities 98,049us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
222,801us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
U.S. Agency Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities 98,049us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
222,801us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Asset Backed Securities [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities 75,674us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_AssetBackedSecuritiesMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Asset Backed Securities [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities 75,674us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_AssetBackedSecuritiesMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Municipal Bonds [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities 3,353us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MunicipalBondsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Municipal Bonds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities $ 3,353us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MunicipalBondsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember