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Inventories - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Inventory Disclosure [Abstract]
Inventory related excess and obsolete charges	$ 12,131us-gaap_InventoryWriteDown	$ 21,671us-gaap_InventoryWriteDown	$ 15,028us-gaap_InventoryWriteDown
Special charges for obsolete inventory		$ 6,423mksi_InventoryWriteDownRelatedToTechnologicalDevelopmentsAndInventoryPartsObsolescence

X

- Definition

Inventory write down related to technological developments and inventory parts obsolescence.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- Details

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X

- Definition

Charge to cost of goods sold that represents the reduction of the carrying amount of inventory, generally attributable to obsolescence or market conditions.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 225

-SubTopic 10

-Section S99

-Paragraph 2

-Subparagraph (SX 210.5-03.2)

-URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 330

-SubTopic 10

-Section 50

-Paragraph 2

-URI http://asc.fasb.org/extlink&oid=28360613&loc=d3e4542-108314

+ Details

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