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Property, Plant and Equipment - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Property Plant And Equipment Capitalized Interest Costs [Abstract]
Depreciation of property, plant and equipment	$ 15,569us-gaap_Depreciation	$ 14,964us-gaap_Depreciation	$ 13,406us-gaap_Depreciation

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- Details

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Namespace Prefix:	mksi_
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Balance Type:	na
Period Type:	duration

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- Definition

The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 28

-Subparagraph (b)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3602-108585

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