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Acquisitions - Additional Information (Detail) (USD $)
In Thousands, unless otherwise specified
 12 Months Ended 0 Months Ended 1 Months Ended 0 Months Ended 3 Months Ended 0 Months Ended
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Mar. 12, 2013
Jun. 30, 2013
Aug. 29, 2012
Dec. 31, 2012
May 30, 2014
Business Acquisition [Line Items]                
Total cash paid, net of cash acquired $ 86,950us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired $ 2,326us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired $ 22,607us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired          
Alter S.r.l [Member]                
Business Acquisition [Line Items]                
Business combination consideration price       2,447us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember		        
Acquisition purchase price, net of cash acquired       2,426us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember		        
Acquisition date Mar. 12, 2013              
Total cash paid, net of cash acquired       2,426us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember		 2,058us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember		      
Cash acquired from acquisition 21us-gaap_CashAcquiredFromAcquisition
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember		              
Remaining cash to be paid 368mksi_BusinessCombinationAssetPurchaseContingentConsiderationMaximumPotentialCashPayment
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember		              
Holdback provisions paid 123mksi_PaymentsUnderBusinessCombinationForHoldbackProvisions
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember		              
Plasmart, Inc. [Member]                
Business Acquisition [Line Items]                
Business combination consideration price           22,700us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet
/ us-gaap_BusinessAcquisitionAxis
= mksi_PlasmartIncMember		    
Acquisition purchase price, net of cash acquired           22,607us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet
/ us-gaap_BusinessAcquisitionAxis
= mksi_PlasmartIncMember		    
Acquisition date Aug. 29, 2012              
Total cash paid, net of cash acquired           22,607us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
/ us-gaap_BusinessAcquisitionAxis
= mksi_PlasmartIncMember		    
Acquisition related costs           1,258us-gaap_BusinessAcquisitionCostOfAcquiredEntityTransactionCosts
/ us-gaap_BusinessAcquisitionAxis
= mksi_PlasmartIncMember		    
Working capital adjustments             1,778mksi_BusinessCombinationWorkingCapitalAdjustment
/ us-gaap_BusinessAcquisitionAxis
= mksi_PlasmartIncMember		  
Step-up inventory           303us-gaap_InventoryAdjustments
/ us-gaap_BusinessAcquisitionAxis
= mksi_PlasmartIncMember		    
Granville-Phillips [Member]                
Business Acquisition [Line Items]                
Business combination consideration price, cash               86,950us-gaap_PaymentsToAcquireBusinessesGross
/ us-gaap_BusinessAcquisitionAxis
= mksi_GranvillePhillipsMember
Business combination contingent consideration               50us-gaap_BusinessCombinationContingentConsiderationLiability
/ us-gaap_BusinessAcquisitionAxis
= mksi_GranvillePhillipsMember
Business combination consideration price               $ 87,000us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet
/ us-gaap_BusinessAcquisitionAxis
= mksi_GranvillePhillipsMember