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Acquisitions - Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended	0 Months Ended		12 Months Ended	0 Months Ended
	Dec. 31, 2014	May 30, 2014	Mar. 12, 2013	Dec. 31, 2013	Aug. 29, 2012	May 31, 2013
Minimum [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Estimated useful life of finite lived intangible assets	2 years
Maximum [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Estimated useful life of finite lived intangible assets	10 years
Granville-Phillips [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price	38,850us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember	$ 38,850us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Alter S.r.l [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price			2,806us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember	268us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember
Plasmart, Inc. [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price					10,745us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember
Customer Relationships [Member] | Granville-Phillips [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price	21,250us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember	21,250us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Estimated useful life of finite lived intangible assets		7 years
Customer Relationships [Member] | Plasmart, Inc. [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price					5,381us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Estimated useful life of finite lived intangible assets					10 years
Trademark and Trade Names [Member] | Granville-Phillips [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price	1,900us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember	1,900us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember
Estimated useful life of finite lived intangible assets		12 years
Trademark and Trade Names [Member] | Alter S.r.l [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price			598us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember
Estimated useful life of finite lived intangible assets						3 years
Developed Technology [Member] | Granville-Phillips [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		15,700us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember
Developed Technology [Member] | Granville-Phillips [Member] | Minimum [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Estimated useful life of finite lived intangible assets		9 years
Developed Technology [Member] | Granville-Phillips [Member] | Maximum [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Estimated useful life of finite lived intangible assets		12 years
Developed Technology [Member] | Alter S.r.l [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price			2,208us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember
Estimated useful life of finite lived intangible assets						9 years
Developed Technology [Member] | Plasmart, Inc. [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price					5,029us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember
Developed Technology [Member] | Plasmart, Inc. [Member] | Minimum [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Estimated useful life of finite lived intangible assets					7 years 6 months
Developed Technology [Member] | Plasmart, Inc. [Member] | Maximum [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Estimated useful life of finite lived intangible assets					9 years 6 months
Trade Mark and Trade Names [Member] | Plasmart, Inc. [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price					$ 335us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TradeNamesMember
Estimated useful life of finite lived intangible assets					7 years

X

- Details

Name:	us-gaap_AcquiredFiniteLivedIntangibleAssetsLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, resulting from a business combination.

+ References

No definition available.

+ Details

Name:	us-gaap_FinitelivedIntangibleAssetsAcquired1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- Definition

Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

+ References

No definition available.

+ Details

Name:	us-gaap_FiniteLivedIntangibleAssetUsefulLife
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

X

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_AlterMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_GranvillePhillipsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_PlasmartIncMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerRelationshipsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_DevelopedTechnologyRightsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TrademarksAndTradeNamesMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_RangeAxis=us-gaap_MaximumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

X

- Details

Name:	us-gaap_RangeAxis=us-gaap_MinimumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: