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Goodwill and Intangible Assets - Goodwill (Parenthetical) (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Mar. 31, 2014	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Jun. 30, 2014	May 30, 2014	Mar. 12, 2013
Goodwill [Line Items]
Goodwill		$ 192,381us-gaap_Goodwill	$ 150,909us-gaap_Goodwill	$ 150,733us-gaap_Goodwill
Granville-Phillips [Member]
Goodwill [Line Items]
Goodwill					41,612us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember	41,612us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Alter S.r.l [Member]
Goodwill [Line Items]
Goodwill							381us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember
Acquisition purchase price adjustment	$ 381us-gaap_GoodwillPurchaseAccountingAdjustments / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember

X

- Definition

Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 45

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=6388280&loc=d3e13770-109266

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
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Period Type:	instant

X

- Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
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Period Type:	duration

X

- Definition

Amount of increase (decrease) from adjustments after acquisition date under purchase accounting of an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (g)

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 10

-Section 25

-Paragraph 16

-URI http://asc.fasb.org/extlink&oid=34752592&loc=d3e961-128460

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Period Type:	duration

X

- Details

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Namespace Prefix:
Data Type:	na
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X

- Details

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