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Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended			0 Months Ended	1 Months Ended	0 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012	Mar. 12, 2013	Jun. 30, 2013	May 30, 2014
Finite-Lived Intangible Assets [Line Items]
Acquisition purchase price	$ 86,950us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired	$ 2,326us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired	$ 22,607us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
Alter S.r.l [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets		268us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember		2,806us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember
Acquisition purchase price				2,426us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember	2,058us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember
Alter S.r.l [Member] | Completed Technology [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets		388us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember		2,208us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Alter S.r.l [Member] | Trademark and Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets				598us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember
Granville-Phillips [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	38,850us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember					38,850us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Granville-Phillips [Member] | Completed Technology [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	15,700us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Granville-Phillips [Member] | Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	21,250us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember					21,250us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Granville-Phillips [Member] | Trademark and Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	$ 1,900us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember					$ 1,900us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember

X

- Definition

Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, resulting from a business combination.

+ References

No definition available.

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X

- Definition

The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

-URI http://asc.fasb.org/extlink&oid=6516133



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 13

-Subparagraph (b)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585

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