XML 36 R81.htm IDEA: XBRL DOCUMENT v2.4.1.9
Debt - Additional Information (Detail) (USD $)
12 Months Ended
Dec. 31, 2014
Institution
Dec. 31, 2013
Japan [Member]    
Debt Instrument [Line Items]    
Number of financial institutions for available lines of credit and borrowing arrangements 2mksi_NumberOfFinancialInstitutionsThatProvideForAggregateBorrowings
/ us-gaap_StatementGeographicalAxis
= country_JP
 
Aggregate borrowings expire and renewed 3 month intervals  
Total available line of credit $ 19,250,000us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity
/ us-gaap_StatementGeographicalAxis
= country_JP
 
Total borrowings outstanding 0us-gaap_LineOfCredit
/ us-gaap_StatementGeographicalAxis
= country_JP
0us-gaap_LineOfCredit
/ us-gaap_StatementGeographicalAxis
= country_JP
Alter S.r.l [Member]    
Debt Instrument [Line Items]    
Total borrowings outstanding $ 0us-gaap_LineOfCredit
/ us-gaap_BusinessAcquisitionAxis
= mksi_AlterMember