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Income Taxes - Components of Income from Continuing Operations Before Income Taxes and Related Provision for Income Taxes (Detail) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Income from continuing operations before income taxes:
United States	$ 86,015us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic	$ 29,546us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic	$ 28,652us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
Foreign	50,378us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign	29,755us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign	46,484us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
Income before income taxes	136,393us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments	59,301us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments	75,136us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments
Current taxes:
United States	8,361us-gaap_CurrentFederalTaxExpenseBenefit	11,338us-gaap_CurrentFederalTaxExpenseBenefit	14,745us-gaap_CurrentFederalTaxExpenseBenefit
State	1,124us-gaap_CurrentStateAndLocalTaxExpenseBenefit	1,159us-gaap_CurrentStateAndLocalTaxExpenseBenefit	783us-gaap_CurrentStateAndLocalTaxExpenseBenefit
Foreign	5,866us-gaap_CurrentForeignTaxExpenseBenefit	14,117us-gaap_CurrentForeignTaxExpenseBenefit	7,760us-gaap_CurrentForeignTaxExpenseBenefit
Current taxes, Total	15,351us-gaap_CurrentIncomeTaxExpenseBenefit	26,614us-gaap_CurrentIncomeTaxExpenseBenefit	23,288us-gaap_CurrentIncomeTaxExpenseBenefit
Deferred taxes:
United States	8,908us-gaap_DeferredFederalIncomeTaxExpenseBenefit	(1,730)us-gaap_DeferredFederalIncomeTaxExpenseBenefit	2,019us-gaap_DeferredFederalIncomeTaxExpenseBenefit
State and Foreign	(3,644)mksi_DeferredStateLocalAndForeignIncomeTaxExpenseBenefit	(1,359)mksi_DeferredStateLocalAndForeignIncomeTaxExpenseBenefit	1,800mksi_DeferredStateLocalAndForeignIncomeTaxExpenseBenefit
Deferred taxes, Total	5,264us-gaap_DeferredIncomeTaxExpenseBenefit	(3,089)us-gaap_DeferredIncomeTaxExpenseBenefit	3,819us-gaap_DeferredIncomeTaxExpenseBenefit
Provision for income taxes	$ 20,615us-gaap_IncomeTaxExpenseBenefit	$ 23,525us-gaap_IncomeTaxExpenseBenefit	$ 27,107us-gaap_IncomeTaxExpenseBenefit

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The component of total income tax expense for the period comprised of the increase (decrease) in the entity's state, local and foreign deferred tax assets and liabilities attributable to continuing operations as determined by applying the provisions of the applicable enacted tax laws.

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The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations.

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The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile.

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Sum of operating profit and nonoperating income or expense before Income or Loss from equity method investments, income taxes, extraordinary items, and noncontrolling interest.

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