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Income Taxes - Significant Components of Deferred Tax Assets and Deferred Tax Liabilities (Detail) (USD $)
In Thousands, unless otherwise specified
Dec. 31, 2014
Dec. 31, 2013
Dec. 31, 2012
Deferred tax assets:      
Loss carry-forwards and credits $ 30,523us-gaap_DeferredTaxAssetsOperatingLossCarryforwards $ 28,138us-gaap_DeferredTaxAssetsOperatingLossCarryforwards  
Inventory and warranty reserves 15,015mksi_DeferredTaxAssetsInventoryAndWarrantyReserves 10,890mksi_DeferredTaxAssetsInventoryAndWarrantyReserves  
Accounts receivable and other accruals 2,726mksi_DeferredTaxAssetsAccountsReceivableAndOtherAccruals 2,615mksi_DeferredTaxAssetsAccountsReceivableAndOtherAccruals  
Stock-based compensation 3,255us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost 3,581us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost  
Executive supplemental retirement benefits 3,321us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits 8,026us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits  
Other   63us-gaap_DeferredTaxAssetsOther  
Total deferred tax assets 54,840us-gaap_DeferredTaxAssetsGross 53,313us-gaap_DeferredTaxAssetsGross  
Deferred tax liabilities:      
Acquired intangible assets (2,833)us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets (2,782)us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets  
Depreciation and amortization (6,537)mksi_DeferredTaxLiabilitiesDepreciationAndAmortization (5,085)mksi_DeferredTaxLiabilitiesDepreciationAndAmortization  
Other (2,002)us-gaap_DeferredTaxLiabilitiesOther (1,202)us-gaap_DeferredTaxLiabilitiesOther  
Total deferred tax liabilities (11,372)us-gaap_DeferredTaxLiabilities (9,069)us-gaap_DeferredTaxLiabilities  
Valuation allowance (26,763)us-gaap_DeferredTaxAssetsValuationAllowance (27,102)us-gaap_DeferredTaxAssetsValuationAllowance (27,497)us-gaap_DeferredTaxAssetsValuationAllowance
Net deferred tax assets $ 16,705us-gaap_DeferredTaxAssetsLiabilitiesNet $ 17,142us-gaap_DeferredTaxAssetsLiabilitiesNet