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Business Segment, Geographic Area, Product and Significant Customer Information - Net Revenues by Reportable Segment (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2014	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting Information [Line Items]
Total net revenues	$ 203,021us-gaap_SalesRevenueNet	$ 186,798us-gaap_SalesRevenueNet	$ 184,697us-gaap_SalesRevenueNet	$ 206,353us-gaap_SalesRevenueNet	$ 204,394us-gaap_SalesRevenueNet	$ 166,453us-gaap_SalesRevenueNet	$ 156,928us-gaap_SalesRevenueNet	$ 141,645us-gaap_SalesRevenueNet	$ 780,869us-gaap_SalesRevenueNet	$ 669,420us-gaap_SalesRevenueNet	$ 643,508us-gaap_SalesRevenueNet
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member]
Segment Reporting Information [Line Items]
Total net revenues									639,623us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember	526,027us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember	479,751us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember
Operating Segments [Member] | Analytical Solutions Group [Member]
Segment Reporting Information [Line Items]
Total net revenues									61,161us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember	56,324us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember	62,765us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember
Operating Segments [Member] | Europe Region Sales & Service [Member]
Segment Reporting Information [Line Items]
Total net revenues									55,115us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember	48,518us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember	51,440us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember
Operating Segments [Member] | Asia Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Total net revenues									240,772us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember	218,048us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember	229,731us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember
Corporate, Eliminations and Other [Member]
Segment Reporting Information [Line Items]
Total net revenues									$ (215,802)us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember	$ (179,497)us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember	$ (180,179)us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember

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- Definition

Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 225

-SubTopic 10

-Section S99

-Paragraph 2

-Subparagraph (SX 210.5-03.1)

-URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 03

-Paragraph 1

-Article 5

+ Details

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