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Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Gross Profit to Consolidated Net Income (Detail) (USD $) In Thousands, unless otherwise specified | 3 Months Ended
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Mar. 31, 2015 | Mar. 31, 2014
Segment Reporting Information [Line Items] |  |
Gross profit | $ 97,046 us-gaap_GrossProfit | $ 89,372 us-gaap_GrossProfit
Research and development | 16,680 us-gaap_ResearchAndDevelopmentExpense | 15,618 us-gaap_ResearchAndDevelopmentExpense
Selling, general and administrative | 30,867 us-gaap_SellingGeneralAndAdministrativeExpense | 34,591 us-gaap_SellingGeneralAndAdministrativeExpense
Acquisition costs | 30 us-gaap_BusinessCombinationAcquisitionRelatedCosts | 228 us-gaap_BusinessCombinationAcquisitionRelatedCosts
Restructuring | 788 us-gaap_RestructuringCharges | 747 us-gaap_RestructuringCharges
Amortization of intangible assets | 1,671 us-gaap_AmortizationOfIntangibleAssets | 410 us-gaap_AmortizationOfIntangibleAssets
Income from operations | 47,010 us-gaap_OperatingIncomeLoss | 37,778 us-gaap_OperatingIncomeLoss
Net interest income | 504 us-gaap_InterestIncomeExpenseNet | 235 us-gaap_InterestIncomeExpenseNet
Income before income taxes | 47,514 us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments | 38,013 us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments
Provision for income taxes | 13,728 us-gaap_IncomeTaxExpenseBenefit | 6,768 us-gaap_IncomeTaxExpenseBenefit
Net income | 33,786 us-gaap_NetIncomeLoss | 31,245 us-gaap_NetIncomeLoss
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member] |  |
Segment Reporting Information [Line Items] |  |
Gross profit | 78,688 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 67,107 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember
Operating Segments [Member] | Global Service [Member] |  |
Segment Reporting Information [Line Items] |  |
Gross profit | 9,603 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_GlobalServiceMember | 8,397 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_GlobalServiceMember
Operating Segments [Member] | Asia Region Sales [Member] |  |
Segment Reporting Information [Line Items] |  |
Gross profit | 6,920 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaRegionSalesMember | 9,077 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaRegionSalesMember
Operating Segments [Member] | Other [Member] |  |
Segment Reporting Information [Line Items] |  |
Gross profit | 6,843 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = us-gaap_AllOtherSegmentsMember | 6,747 us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = us-gaap_AllOtherSegmentsMember
Corporate and Eliminations [Member] |  |
Segment Reporting Information [Line Items] |  |
Gross profit | $ (5,008)us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = mksi_CorporateAndEliminationsMember | $ (1,956)us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = mksi_CorporateAndEliminationsMember

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- Definition The aggregate expense charged against earnings to allocate the cost of intangible assets (nonphysical assets not used in production) in a systematic and rational manner to the periods expected to benefit from such assets. As a noncash expense, this element is added back to net income when calculating cash provided by or used in operations using the indirect method. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 28 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3602-108585 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 30 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6388964&loc=d3e16225-109274 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 30 -Section 50 -Paragraph 2 -Subparagraph (a)(2) -URI http://asc.fasb.org/extlink&oid=26713463&loc=d3e16323-109275 + Details
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- Definition This element represents acquisition-related costs incurred to effect a business combination which costs have been expensed during the period. Such costs include finder's fees; advisory, legal, accounting, valuation, and other professional or consulting fees; general administrative costs, including the costs of maintaining an internal acquisitions department; and may include costs of registering and issuing debt and equity securities. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 25 -Paragraph 23 -URI http://asc.fasb.org/extlink&oid=34752592&loc=d3e1043-128460 + Details
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- Definition Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 225 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SX 210.5-03.1,2) -URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688 + Details
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- Definition Sum of operating profit and nonoperating income or expense before Income or Loss from equity method investments, income taxes, extraordinary items, and noncontrolling interest. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.4-08.(h)(1)(i)) -URI http://asc.fasb.org/extlink&oid=26873400&loc=d3e23780-122690 + Details
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- Definition Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.4-08.(h)) -URI http://asc.fasb.org/extlink&oid=26873400&loc=d3e23780-122690 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 08 -Paragraph h -Article 4 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Income Tax Expense (or Benefit) -URI http://asc.fasb.org/extlink&oid=6515339 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 9 -Subparagraph (a),(b) -URI http://asc.fasb.org/extlink&oid=6907707&loc=d3e32639-109319 + Details
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- Definition The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 985 -SubTopic 20 -Section 50 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=6501960&loc=d3e128462-111756 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 730 -SubTopic 10 -Section 50 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=6420194&loc=d3e21568-108373 + Details
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