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Acquisitions - Summary of Preliminary Estimated Fair Value of Assets Acquired and Liabilities Assumed (Parenthetical) (Detail) (Precisive, LLC [Member], USD $) In Thousands, unless otherwise specified | 0 Months Ended
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Mar. 17, 2015
Precisive, LLC [Member] |
Business Acquisition [Line Items] |
Business acquisition, cash acquired | $ 435 us-gaap_CashAcquiredFromAcquisition / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember

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- Details
Name: | us-gaap_BusinessAcquisitionLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition The cash inflow associated with the acquisition of business during the period (for example, cash that was held by the acquired business). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 12 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3179-108585 + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration