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Acquisitions - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified | 3 Months Ended | 0 Months Ended
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Mar. 31, 2015 | Mar. 17, 2015
Business Acquisition [Line Items] |  |
Payments to acquire business, net of cash acquired | $ 9,867 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired |
Precisive, LLC [Member] |  |
Business Acquisition [Line Items] |  |
Payments to acquire business, net of cash acquired |  | 12,155 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, ownership percentage |  | 100.00%us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, cash acquired |  | 435 us-gaap_CashAcquiredFromAcquisition / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, deferred consideration payment |  | $ 2,600 mksi_BusinessAcquisitionDeferredConsiderationPayments / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, deferred consideration payment period |  | 15 months

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- Definition Business combination deferred consideration payment period. + References No definition available. + Details
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- Definition Percentage of voting equity interests acquired at the acquisition date in the business combination. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=25497992&loc=d3e1392-128463 + Details
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- Definition The cash inflow associated with the acquisition of business during the period (for example, cash that was held by the acquired business). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 12 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3179-108585 + Details
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- Definition The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585 + Details
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