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Acquisitions - Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives (Detail) (USD $) In Thousands, unless otherwise specified | 3 Months Ended | 0 Months Ended
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Mar. 31, 2015 | Mar. 17, 2015
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price | $ 5,110 us-gaap_FinitelivedIntangibleAssetsAcquired1 |
Precisive, LLC [Member] |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price |  | 5,110 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Order Backlog [Member] | Precisive, LLC [Member] |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price |  | 50 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_OrderOrProductionBacklogMember
Estimated useful life of finite-lived intangible assets |  | 18 months
Customer Relationships [Member] |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price | 1,430 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember |
Customer Relationships [Member] | Precisive, LLC [Member] |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price |  | 1,430 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Estimated useful life of finite-lived intangible assets |  | 12 years
Exclusive Patent License [Member] | Precisive, LLC [Member] |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price |  | 2,600 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentsMember
Estimated useful life of finite-lived intangible assets |  | 10 years
Trade names [Member] | Precisive, LLC [Member] |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price |  | 210 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TradeNamesMember
Estimated useful life of finite-lived intangible assets |  | 10 years
Current Developed Technology [Member] | Precisive, LLC [Member] |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets, purchase price |  | $ 820 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember
Estimated useful life of finite-lived intangible assets |  | 10 years

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- Definition Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References No definition available. + Details
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