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Business Segment, Geographic Area, Product and Significant Customer Information - Worldwide Net Revenue for Each Group of Products (Detail) (USD $) In Thousands, unless otherwise specified | 3 Months Ended
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Mar. 31, 2015 | Mar. 31, 2014
Revenue from External Customer [Line Items] |  |
Net sales from product groups | $ 213,839 us-gaap_SalesRevenueNet | $ 206,353 us-gaap_SalesRevenueNet
Instruments, Control and Vacuum Products [Member] |  |
Revenue from External Customer [Line Items] |  |
Net sales from product groups | 110,436 us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_InstrumentsControlAndVacuumProductsMember | 101,657 us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_InstrumentsControlAndVacuumProductsMember
Power and Reactive Gas Products [Member] |  |
Revenue from External Customer [Line Items] |  |
Net sales from product groups | 88,499 us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_PowerAndReactiveGasProductsMember | 90,602 us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_PowerAndReactiveGasProductsMember
Analytical Solutions Group Products [Member] |  |
Revenue from External Customer [Line Items] |  |
Net sales from product groups | $ 14,904 us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_AnalyticalSolutionsGroupProductsMember | $ 14,094 us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_AnalyticalSolutionsGroupProductsMember

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- Definition Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 225 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SX 210.5-03.1) -URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 03 -Paragraph 1 -Article 5 + Details
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