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Goodwill and Intangible Assets - Goodwill (Parenthetical) (Detail) (USD $) In Thousands, unless otherwise specified | 3 Months Ended |  |  |  |  |
--- | --- | --- | --- | --- | --- | ---
Mar. 31, 2014 | Mar. 31, 2015 | Dec. 31, 2014 | Dec. 31, 2013 | Mar. 17, 2015 | Jun. 30, 2014
Goodwill [Line Items] |  |  |  |  |  |
Goodwill |  | $ 199,330 us-gaap_Goodwill | $ 192,381 us-gaap_Goodwill | $ 150,909 us-gaap_Goodwill |  |
Precisive, LLC [Member] |  |  |  |  |  |
Goodwill [Line Items] |  |  |  |  |  |
Goodwill |  | 7,085 us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember |  |  | 7,085 us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember |
Granville-Phillips [Member] |  |  |  |  |  |
Goodwill [Line Items] |  |  |  |  |  |
Goodwill |  |  |  |  |  | 41,612 us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Alter S.r.l [Member] |  |  |  |  |  |
Goodwill [Line Items] |  |  |  |  |  |
Acquisition purchase price | $ 381 us-gaap_GoodwillPurchaseAccountingAdjustments / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |  |

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- Definition Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 50 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 45 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=6388280&loc=d3e13770-109266 + Details
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- Definition Amount of increase (decrease) from adjustments after acquisition date under purchase accounting of an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (g) -URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 10 -Section 25 -Paragraph 16 -URI http://asc.fasb.org/extlink&oid=34752592&loc=d3e961-128460 + Details
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