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Debt - Additional Information (Detail) (Japan [Member], USD $) | 3 Months Ended |
--- | --- | ---
Mar. 31, 2015 Institution | Dec. 31, 2014
Japan [Member] |  |
Debt Instrument [Line Items] |  |
Number of financial institutions for available lines of credit and borrowing arrangements | 2 mksi_NumberOfFinancialInstitutionsThatProvideForAggregateBorrowings / us-gaap_StatementGeographicalAxis = country_JP |
Aggregate borrowings expire and renewed | 3 month intervals |
Total available line of credit | $ 19,155,000 us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity / us-gaap_StatementGeographicalAxis = country_JP |
Total borrowings outstanding | $ 0 us-gaap_LineOfCredit / us-gaap_StatementGeographicalAxis = country_JP | $ 0 us-gaap_LineOfCredit / us-gaap_StatementGeographicalAxis = country_JP

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- Definition General renewal period for line of credit facility. + References No definition available. + Details
Name: | mksi_LineOfCreditFacilityRenewalPeriod
Namespace Prefix: | mksi_
Data Type: | us-types:durationStringItemType
Balance Type: | na
Period Type: | duration

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- Definition Number of financial institutions for lines of credit and borrowing arrangements. + References No definition available. + Details
Name: | mksi_NumberOfFinancialInstitutionsThatProvideForAggregateBorrowings
Namespace Prefix: | mksi_
Data Type: | xbrli:integerItemType
Balance Type: | na
Period Type: | instant

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- Details
Name: | us-gaap_DebtInstrumentLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition The carrying value as of the balance sheet date of the current and noncurrent portions of long-term obligations drawn from a line of credit, which is a bank's commitment to make loans up to a specific amount. Examples of items that might be included in the application of this element may consist of letters of credit, standby letters of credit, and revolving credit arrangements, under which borrowings can be made up to a maximum amount as of any point in time conditional on satisfaction of specified terms before, as of and after the date of drawdowns on the line. Includes short-term obligations that would normally be classified as current liabilities but for which (a) postbalance sheet date issuance of a long term obligation to refinance the short term obligation on a long term basis, or (b) the enterprise has entered into a financing agreement that clearly permits the enterprise to refinance the short-term obligation on a long term basis and the following conditions are met (1) the agreement does not expire within 1 year and is not cancelable by the lender except for violation of an objectively determinable provision, (2) no violation exists at the BS date, and (3) the lender has entered into the financing agreement is expected to be financially capable of honoring the agreement. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 942 -SubTopic 210 -Section S99 -Paragraph 1 -Subparagraph (SX 210.9-03.16) -URI http://asc.fasb.org/extlink&oid=6876686&loc=d3e534808-122878 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 19, 20, 22 -Article 5 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 944 -SubTopic 210 -Section S99 -Paragraph 1 -Subparagraph (SX 210.7-03.16) -URI http://asc.fasb.org/extlink&oid=6879938&loc=d3e572229-122910 + Details
Name: | us-gaap_LineOfCredit
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

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- Definition Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.19(b),22(b)) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 19, 22 -Article 5 + Details
Name: | us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant