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Business Segment, Geographic Area, Product and Significant Customer Information - Customers with Net Revenues Greater than 10% of Total Net Revenues (Detail) (Customer Concentration Risk [Member], Sales Revenue, Net [Member]) | 3 Months Ended
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Mar. 31, 2015 | Mar. 31, 2014
Customer A [Member] |  |
Revenue, Major Customer [Line Items] |  |
Percentage of total net revenues | 17.40%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerOneMember | 20.30%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerOneMember
Customer B [Member] |  |
Revenue, Major Customer [Line Items] |  |
Percentage of total net revenues | 12.10%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerTwoMember | 13.10%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerTwoMember

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- Definition For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 825 -SubTopic 10 -Section 50 -Paragraph 21 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=35750535&loc=d3e13537-108611 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 275 -SubTopic 10 -Section 50 -Paragraph 20 -URI http://asc.fasb.org/extlink&oid=6927468&loc=d3e6404-108592 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 825 -SubTopic 10 -Section 50 -Paragraph 20 -URI http://asc.fasb.org/extlink&oid=35750535&loc=d3e13531-108611 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 275 -SubTopic 10 -Section 50 -Paragraph 18 -URI http://asc.fasb.org/extlink&oid=6927468&loc=d3e6351-108592 + Details
Name: | us-gaap_ConcentrationRiskPercentage1
Namespace Prefix: | us-gaap_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

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- Details
Name: | us-gaap_EntityWideRevenueMajorCustomerLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration