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Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) (USD $) In Thousands, unless otherwise specified | 3 Months Ended | 12 Months Ended
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Mar. 31, 2015 | Dec. 31, 2014
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets | $ 5,110 us-gaap_FinitelivedIntangibleAssetsAcquired1 |
Completed Technology [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets | 820 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember |
Customer Relationships [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets | 1,430 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember |
Trademarks and Trade Names [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets | 2,860 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember |
Granville-Phillips [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets |  | 38,850 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Granville-Phillips [Member] | Completed Technology [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets |  | 15,700 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Granville-Phillips [Member] | Customer Relationships [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets |  | 21,250 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Granville-Phillips [Member] | Trademarks and Trade Names [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Acquired intangible assets |  | $ 1,900 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember

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- Definition Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, resulting from a business combination. + References No definition available. + Details
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