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Business Segment, Geographic Area, Product and Significant Customer Information - Net Revenues by Reportable Segment (Detail) (USD $) In Thousands, unless otherwise specified | 3 Months Ended
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Mar. 31, 2015 | Mar. 31, 2014
Segment Reporting Information [Line Items] |  |
Total net revenues | $ 213,839 us-gaap_SalesRevenueNet | $ 206,353 us-gaap_SalesRevenueNet
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member] |  |
Segment Reporting Information [Line Items] |  |
Total net revenues | 179,233 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 165,498 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember
Operating Segments [Member] | Global Service [Member] |  |
Segment Reporting Information [Line Items] |  |
Total net revenues | 27,743 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_GlobalServiceMember | 25,167 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_GlobalServiceMember
Operating Segments [Member] | Asia Region Sales [Member] |  |
Segment Reporting Information [Line Items] |  |
Total net revenues | 55,377 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaRegionSalesMember | 52,099 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaRegionSalesMember
Operating Segments [Member] | Other [Member] |  |
Segment Reporting Information [Line Items] |  |
Total net revenues | 21,216 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = us-gaap_AllOtherSegmentsMember | 20,893 us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = us-gaap_AllOtherSegmentsMember
Corporate and Eliminations [Member] |  |
Segment Reporting Information [Line Items] |  |
Total net revenues | $ (69,730)us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = mksi_CorporateAndEliminationsMember | $ (57,304)us-gaap_SalesRevenueNet / us-gaap_ConsolidationItemsAxis = mksi_CorporateAndEliminationsMember

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- Definition Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 225 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SX 210.5-03.1) -URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 03 -Paragraph 1 -Article 5 + Details
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- Details
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