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Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Parenthetical) (Detail) (USD $) In Thousands, unless otherwise specified | Mar. 31, 2015 | Dec. 31, 2014
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Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Not included in cash and cash equivalent amount | $ 95,212 us-gaap_CashAndCashEquivalentsFairValueDisclosure | $ 167,517 us-gaap_CashAndCashEquivalentsFairValueDisclosure
Non Negotiable Time Deposits [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Not included in cash and cash equivalent amount | $ 9,612 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = mksi_NonNegotiableTimeDepositsMember | $ 7,997 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = mksi_NonNegotiableTimeDepositsMember

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- Definition Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Cash -URI http://asc.fasb.org/extlink&oid=6506951 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Cash Equivalents -URI http://asc.fasb.org/extlink&oid=6507016 + Details
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