XML 28 R42.htm IDEA: XBRL DOCUMENT v2.4.1.9
Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Detail) (USD $)
In Thousands, unless otherwise specified
Mar. 31, 2015
Dec. 31, 2014
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Derivatives - currency forward contracts $ 1,240us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue $ 1,966us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
Derivatives - currency forward contracts 318us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue  
Cash and cash equivalents 95,212us-gaap_CashAndCashEquivalentsFairValueDisclosure 167,517us-gaap_CashAndCashEquivalentsFairValueDisclosure
Short-term investments 158,631us-gaap_ShortTermInvestments 129,594us-gaap_ShortTermInvestments
Other current assets 1,240us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue 1,966us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
Long-term investments 237,313us-gaap_AvailableForSaleSecuritiesNoncurrent 157,201us-gaap_AvailableForSaleSecuritiesNoncurrent
Other current liabilities 318us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue  
Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Derivatives - currency forward contracts 1,240us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total assets 485,073us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
418,828us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Derivatives - currency forward contracts 318us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Cash and cash equivalents 87,889us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,923us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Short-term investments 158,631us-gaap_ShortTermInvestments
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,594us-gaap_ShortTermInvestments
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current assets 1,240us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total current assets 247,760mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
261,627mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Long-term investments 237,313us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
157,201us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current liabilities 318us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Total assets 87,790us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,092us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Cash and cash equivalents 87,790us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,092us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total current assets 87,790mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,092mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Derivatives - currency forward contracts 1,240us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total assets 397,283us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
289,736us-gaap_AssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Derivatives - currency forward contracts 318us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Cash and cash equivalents 99us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
831us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Short-term investments 158,631us-gaap_ShortTermInvestments
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,594us-gaap_ShortTermInvestments
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current assets 1,240us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
2,110us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Total current assets 159,970mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
132,535mksi_CurrentAssetsFairValueDisclosure
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Long-term investments 237,313us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
157,201us-gaap_AvailableForSaleSecuritiesNoncurrent
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Other current liabilities 318us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Money Market Funds [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 87,790us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,092us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Money Market Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 87,790us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
129,092us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_MoneyMarketFundsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel1Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Bankers Acceptance Drafts [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 99us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
131us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities\investments 327us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
82us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Bankers Acceptance Drafts [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents 99us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
131us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities\investments 327us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
82us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_BankersAcceptanceMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Time Deposits And Certificates of Deposit [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 5,400us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_TimeDepositsAndCertificatesOfDepositMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
20,948us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_TimeDepositsAndCertificatesOfDepositMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Time Deposits And Certificates of Deposit [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 5,400us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_TimeDepositsAndCertificatesOfDepositMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
20,948us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_TimeDepositsAndCertificatesOfDepositMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Commercial Paper [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 1,447us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_CommercialPaperMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Commercial Paper [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 1,447us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_CommercialPaperMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
 
Asset Backed Securities [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 129,242us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_AssetBackedSecuritiesMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
75,674us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_AssetBackedSecuritiesMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Asset Backed Securities [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 129,242us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_AssetBackedSecuritiesMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
75,674us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_AssetBackedSecuritiesMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Corporate Obligations [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents   700us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities\investments 148,445us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
88,689us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Corporate Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Cash and cash equivalents   700us-gaap_CashAndCashEquivalentsFairValueDisclosure
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities\investments 148,445us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
88,689us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= mksi_CorporateObligationsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Municipal Bonds [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 7,678us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USStatesAndPoliticalSubdivisionsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
3,353us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USStatesAndPoliticalSubdivisionsMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Municipal Bonds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 7,678us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USStatesAndPoliticalSubdivisionsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
3,353us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USStatesAndPoliticalSubdivisionsMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
U.S. Agency Obligations [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments 103,405us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
98,049us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
U.S. Agency Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member]    
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]    
Available-for-sale securities\investments $ 103,405us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
$ 98,049us-gaap_AvailableForSaleSecurities
/ us-gaap_FairValueByAssetClassAxis
= us-gaap_USGovernmentAgenciesDebtSecuritiesMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel2Member
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember