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Derivatives - Summary of Primary Net Hedging Positions and Corresponding Fair Values (Detail) (USD $) In Thousands, unless otherwise specified	Mar. 31, 2015	Dec. 31, 2014
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	$ 84,063us-gaap_DerivativeAssetNotionalAmount	$ 28,650us-gaap_DerivativeAssetNotionalAmount
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	922us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet	1,966us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet
Forward Exchange Contracts [Member] | U.S. Dollar/Japanese Yen [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	29,708us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	8,035us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	478us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	1,107us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/South Korean Won [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	32,692us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	12,512us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	133us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	372us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/Euro [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	5,009us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	2,060us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	286us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	185us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/U.K. Pound Sterling [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	3,794us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	1,308us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	74us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	70us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/Taiwan Dollar [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	12,860us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarTaiwaneseDollarsMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	4,735us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarTaiwaneseDollarsMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	$ (49)us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarTaiwaneseDollarsMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember	$ 232us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarTaiwaneseDollarsMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember

X

- Definition

Nominal or face amount used to calculate payments on the derivative asset.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 815

-SubTopic 10

-Section 50

-Paragraph 1B

-URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5580258-113959



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 815

-SubTopic 10

-Section 50

-Paragraph 1A

-Subparagraph (d)

-URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5579245-113959



Reference 3: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Notional Amount

-URI http://asc.fasb.org/extlink&oid=6519104

+ Details

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- Details

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Data Type:	xbrli:stringItemType
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X

- Definition

Fair value as of the balance sheet date of all foreign currency derivatives designated as cash flow hedging instruments.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 815

-SubTopic 10

-Section 50

-Paragraph 4B

-Subparagraph (a),(b),(c)(1)

-URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5624163-113959

+ Details

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Period Type:	instant

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- Details

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