XML 80 R51.htm IDEA: XBRL DOCUMENT v2.4.1.9

Acquisitions - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended	0 Months Ended
	Mar. 31, 2015	Mar. 17, 2015
Business Acquisition [Line Items]
Payments to acquire business, net of cash acquired	$ 9,867us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
Precisive, LLC [Member]
Business Acquisition [Line Items]
Payments to acquire business, net of cash acquired		12,155us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, ownership percentage		100.00%us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, cash acquired		435us-gaap_CashAcquiredFromAcquisition / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, deferred consideration payment		$ 2,600mksi_BusinessAcquisitionDeferredConsiderationPayments / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Business acquisition, deferred consideration payment period		15 months

X

- Definition

Business acquisition deferred consideration payments.

+ References

No definition available.

+ Details

Name:	mksi_BusinessAcquisitionDeferredConsiderationPayments
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- Definition

Business combination deferred consideration payment period.

+ References

No definition available.

+ Details

Name:	mksi_BusinessCombinationDeferredConsiderationPaymentPeriod
Namespace Prefix:	mksi_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

X

- Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Percentage of voting equity interests acquired at the acquisition date in the business combination.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 10

-Section 50

-Paragraph 2

-Subparagraph (c)

-URI http://asc.fasb.org/extlink&oid=25497992&loc=d3e1392-128463

+ Details

Name:	us-gaap_BusinessAcquisitionPercentageOfVotingInterestsAcquired
Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

X

- Definition

The cash inflow associated with the acquisition of business during the period (for example, cash that was held by the acquired business).

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

-URI http://asc.fasb.org/extlink&oid=6516133



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 12

-Subparagraph (b)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3179-108585

+ Details

Name:	us-gaap_CashAcquiredFromAcquisition
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- Definition

The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

-URI http://asc.fasb.org/extlink&oid=6516133



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 13

-Subparagraph (b)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585

+ Details

Name:	us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

X

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_PrecisiveLlcMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: