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Acquisitions - Summary of Preliminary Estimated Fair Value of Assets Acquired and Liabilities Assumed (Detail) (USD $)
In Thousands, unless otherwise specified
3 Months Ended 0 Months Ended
Mar. 31, 2015
Mar. 17, 2015
Dec. 31, 2014
Dec. 31, 2013
Business Acquisition [Line Items]        
Goodwill $ 199,330us-gaap_Goodwill   $ 192,381us-gaap_Goodwill $ 150,909us-gaap_Goodwill
Total purchase price, net of cash acquired of $435 9,867us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired      
Precisive, LLC [Member]        
Business Acquisition [Line Items]        
Current assets   285us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssets
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember
   
Non-current assets   18mksi_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentAssetsOtherThanIntangibles
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember
   
Intangible assets   5,110us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibleAssetsOtherThanGoodwill
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember
   
Goodwill 7,085us-gaap_Goodwill
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember
7,085us-gaap_Goodwill
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember
   
Total assets acquired   12,498us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember
   
Total current liabilities assumed   343us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilities
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember
   
Total purchase price, net of cash acquired of $435   $ 12,155us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
/ us-gaap_BusinessAcquisitionAxis
= mksi_PrecisiveLlcMember