XML 48 R53.htm IDEA: XBRL DOCUMENT v2.4.1.9

Acquisitions - Summary of Preliminary Estimated Fair Value of Assets Acquired and Liabilities Assumed (Parenthetical) (Detail) (Precisive, LLC [Member], USD $) In Thousands, unless otherwise specified	0 Months Ended
	Mar. 17, 2015
Precisive, LLC [Member]
Business Acquisition [Line Items]
Business acquisition, cash acquired	$ 435us-gaap_CashAcquiredFromAcquisition / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember

X

- Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

The cash inflow associated with the acquisition of business during the period (for example, cash that was held by the acquired business).

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

-URI http://asc.fasb.org/extlink&oid=6516133



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 12

-Subparagraph (b)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3179-108585

+ Details

Name:	us-gaap_CashAcquiredFromAcquisition
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration