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Acquisitions - Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended	0 Months Ended
	Mar. 31, 2015	Mar. 17, 2015
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price	$ 5,110us-gaap_FinitelivedIntangibleAssetsAcquired1
Precisive, LLC [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		5,110us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember
Order Backlog [Member] | Precisive, LLC [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		50us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_OrderOrProductionBacklogMember
Estimated useful life of finite-lived intangible assets		18 months
Customer Relationships [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price	1,430us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Customer Relationships [Member] | Precisive, LLC [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		1,430us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Estimated useful life of finite-lived intangible assets		12 years
Exclusive Patent License [Member] | Precisive, LLC [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		2,600us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentsMember
Estimated useful life of finite-lived intangible assets		10 years
Trade names [Member] | Precisive, LLC [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		210us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TradeNamesMember
Estimated useful life of finite-lived intangible assets		10 years
Current Developed Technology [Member] | Precisive, LLC [Member]
Acquired Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets, purchase price		$ 820us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PrecisiveLlcMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember
Estimated useful life of finite-lived intangible assets		10 years

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