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Goodwill and Intangible Assets - Goodwill (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended	12 Months Ended
	Mar. 31, 2015	Dec. 31, 2014
Goodwill and Intangible Assets Disclosure [Abstract]
Beginning balance, Goodwill Gross Carrying Amount	$ 331,795us-gaap_GoodwillGross	$ 290,323us-gaap_GoodwillGross
Acquired goodwill, Gross Carrying Amount	7,085us-gaap_GoodwillAcquiredDuringPeriod	41,993us-gaap_GoodwillAcquiredDuringPeriod
Foreign currency translation, Gross Carrying Amount	(136)mksi_GoodwillTranslationAdjustmentsGross	(521)mksi_GoodwillTranslationAdjustmentsGross
Ending balance, Goodwill Gross Carrying Amount	338,744us-gaap_GoodwillGross	331,795us-gaap_GoodwillGross
Beginning balance, Accumulated Impairment (Loss)	(139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss	(139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss
Acquired goodwill, Accumulated Impairment (Loss)	0mksi_GoodwillAcquiredImpairmentLoss	0mksi_GoodwillAcquiredImpairmentLoss
Foreign currency translation, Accumulated Impairment (Loss)	0us-gaap_GoodwillTranslationAdjustments	0us-gaap_GoodwillTranslationAdjustments
Ending balance, Accumulated Impairment (Loss)	(139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss	(139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss
Beginning balance, Goodwill Net	192,381us-gaap_Goodwill	150,909us-gaap_Goodwill
Acquired goodwill, Net	7,085mksi_GoodwillAcquiredDuringPeriodNet	41,993mksi_GoodwillAcquiredDuringPeriodNet
Foreign currency translation, Net	(136)mksi_GoodwillTranslationAdjustmentsNet	(521)mksi_GoodwillTranslationAdjustmentsNet
Ending balance, Goodwill Net	$ 199,330us-gaap_Goodwill	$ 192,381us-gaap_Goodwill

X

- Definition

Goodwill acquired during period net.

+ References

No definition available.

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Balance Type:	debit
Period Type:	duration

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- Definition

Goodwill acquired impairment loss.

+ References

No definition available.

+ Details

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X

- Definition

Goodwill translation adjustments gross.

+ References

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Balance Type:	debit
Period Type:	duration

X

- Definition

Goodwill translation adjustments, net.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- Definition

Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 45

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=6388280&loc=d3e13770-109266

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- Definition

Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (a)

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267

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- Definition

Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (a,h)

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267

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Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (a,h)

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267

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- Definition

Amount of increase (decrease) from foreign currency translation adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (f)

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267

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