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Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended	12 Months Ended
	Mar. 31, 2015	Dec. 31, 2014
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	$ 5,110us-gaap_FinitelivedIntangibleAssetsAcquired1
Completed Technology [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	820us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	1,430us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Trademarks and Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets	2,860us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember
Granville-Phillips [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets		38,850us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Granville-Phillips [Member] | Completed Technology [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets		15,700us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Granville-Phillips [Member] | Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets		21,250us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Granville-Phillips [Member] | Trademarks and Trade Names [Member]
Finite-Lived Intangible Assets [Line Items]
Acquired intangible assets		$ 1,900us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember

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- Definition

Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, resulting from a business combination.

+ References

No definition available.

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