Consolidated Statements of Cash Flows (Unaudited) (USD $) In Thousands, unless otherwise specified	3 Months Ended
Mar. 31, 2015	Mar. 31, 2014
Cash flows from operating activities:
Net income	$ 33,786us-gaap_NetIncomeLoss	$ 31,245us-gaap_NetIncomeLoss
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation and amortization	5,532us-gaap_DepreciationAndAmortization	4,150us-gaap_DepreciationAndAmortization
Stock-based compensation	3,212us-gaap_ShareBasedCompensation	3,198us-gaap_ShareBasedCompensation
Provision for excess and obsolete inventory	2,683us-gaap_InventoryWriteDown	2,613us-gaap_InventoryWriteDown
Provision for bad debt	(172)us-gaap_ProvisionForDoubtfulAccounts	94us-gaap_ProvisionForDoubtfulAccounts
Deferred income taxes	736us-gaap_DeferredIncomeTaxExpenseBenefit	(3,974)us-gaap_DeferredIncomeTaxExpenseBenefit
Excess tax benefits from stock-based compensation	(524)	(189)
Other	1us-gaap_OtherNoncashIncomeExpense	(141)us-gaap_OtherNoncashIncomeExpense
Changes in operating assets and liabilities:
Trade accounts receivable	(19,030)	(2,784)
Inventories	(12,817)us-gaap_IncreaseDecreaseInInventories	(7,402)us-gaap_IncreaseDecreaseInInventories
Income taxes	2,034	(5,462)
Other current assets	(5,029)	(1,286)
Accrued compensation	(4,930)	(6,872)
Other current and non-current liabilities	2,735	2,512
Accounts payable	3,587	(4,656)
Other assets	7,801	(1,143)
Net cash provided by operating activities	19,605	9,903
Cash flows from investing activities:
Acquisition of businesses, net of cash acquired	(9,867)
Purchases of investments	(164,327)us-gaap_PaymentsToAcquireInvestments	(128,524)us-gaap_PaymentsToAcquireInvestments
Maturities of investments	38,205	104,623
Sales of investments	17,414	24,948
Purchases of property, plant and equipment	(2,504)	(3,098)
Other	5	79
Net cash used in investing activities	(121,074)	(1,972)
Cash flows from financing activities:
Repurchase of common stock		(945)
Net payments related to employee stock awards	(2,105)mksi_PaymentsForEmployeeStockAwards	(762)mksi_PaymentsForEmployeeStockAwards
Dividend payments to common stockholders	(8,784)us-gaap_PaymentsOfDividendsCommonStock	(8,553)us-gaap_PaymentsOfDividendsCommonStock
Excess tax benefits from stock-based compensation	524	189
Net cash used in financing activities	(10,365)	(10,071)
Effect of exchange rate changes on cash and cash equivalents	(890)	328
Decrease in cash and cash equivalents	(112,724)	(1,812)
Cash and cash equivalents at beginning of period	305,437	288,902
Cash and cash equivalents at end of period	$ 192,713	$ 287,090

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