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Business Segment, Geographic Area, Product and Significant Customer Information - Goodwill Associated with Reportable Segments (Detail) (USD $)
In Thousands, unless otherwise specified
Mar. 31, 2015
Dec. 31, 2014
Dec. 31, 2013
Segment Reporting Information [Line Items]      
Goodwill $ 199,330us-gaap_Goodwill $ 192,381us-gaap_Goodwill $ 150,909us-gaap_Goodwill
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member]      
Segment Reporting Information [Line Items]      
Goodwill 173,510us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_OperatingSegmentsMember
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_AdvanceManufacturingCapitalEquipmentMember
166,946us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_OperatingSegmentsMember
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_AdvanceManufacturingCapitalEquipmentMember
 
Operating Segments [Member] | Global Service [Member]      
Segment Reporting Information [Line Items]      
Goodwill 19,728us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_OperatingSegmentsMember
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_GlobalServiceMember
19,728us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_OperatingSegmentsMember
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_GlobalServiceMember
 
Operating Segments [Member] | Other [Member]      
Segment Reporting Information [Line Items]      
Goodwill 6,228us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_OperatingSegmentsMember
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_AllOtherSegmentsMember
6,228us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_OperatingSegmentsMember
/ us-gaap_StatementBusinessSegmentsAxis
= us-gaap_AllOtherSegmentsMember
 
Foreign Currency Translation [Member] | Segment Reconciling Items [Member]      
Segment Reporting Information [Line Items]      
Goodwill $ (136)us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_MaterialReconcilingItemsMember
/ us-gaap_StatementEquityComponentsAxis
= us-gaap_AccumulatedTranslationAdjustmentMember
$ (521)us-gaap_Goodwill
/ us-gaap_ConsolidationItemsAxis
= us-gaap_MaterialReconcilingItemsMember
/ us-gaap_StatementEquityComponentsAxis
= us-gaap_AccumulatedTranslationAdjustmentMember