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Business Segment, Geographic Area, Product and Significant Customer Information - Worldwide Net Revenue for Each Group of Products (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Mar. 31, 2015	Mar. 31, 2014
Revenue from External Customer [Line Items]
Net sales from product groups	$ 213,839us-gaap_SalesRevenueNet	$ 206,353us-gaap_SalesRevenueNet
Instruments, Control and Vacuum Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups	110,436us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_InstrumentsControlAndVacuumProductsMember	101,657us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_InstrumentsControlAndVacuumProductsMember
Power and Reactive Gas Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups	88,499us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_PowerAndReactiveGasProductsMember	90,602us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_PowerAndReactiveGasProductsMember
Analytical Solutions Group Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups	$ 14,904us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_AnalyticalSolutionsGroupProductsMember	$ 14,094us-gaap_SalesRevenueNet / us-gaap_ProductOrServiceAxis = mksi_AnalyticalSolutionsGroupProductsMember

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- Definition

Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 225

-SubTopic 10

-Section S99

-Paragraph 2

-Subparagraph (SX 210.5-03.1)

-URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 03

-Paragraph 1

-Article 5

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