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Business Segment, Geographic Area, Product and Significant Customer Information - Customers with Net Revenues Greater than 10% of Total Net Revenues (Detail) (Customer Concentration Risk [Member], Sales Revenue, Net [Member])
 3 Months Ended
Mar. 31, 2015
Mar. 31, 2014
Customer A [Member]
    
Revenue, Major Customer [Line Items]    
Percentage of total net revenues 17.40%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= mksi_CustomerOneMember		 20.30%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= mksi_CustomerOneMember
Customer B [Member]
    
Revenue, Major Customer [Line Items]    
Percentage of total net revenues 12.10%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= mksi_CustomerTwoMember		 13.10%us-gaap_ConcentrationRiskPercentage1
/ us-gaap_ConcentrationRiskByBenchmarkAxis
= us-gaap_SalesRevenueNetMember
/ us-gaap_ConcentrationRiskByTypeAxis
= us-gaap_CustomerConcentrationRiskMember
/ us-gaap_MajorCustomersAxis
= mksi_CustomerTwoMember