This element represents the amount of any measurement period adjustment (as defined) realized during the reporting period to inventory acquired in connection with a business combination for which the initial accounting was incomplete.

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 10

-Section 50

-Paragraph 6

-Subparagraph (c)

-URI http://asc.fasb.org/extlink&oid=56956515&loc=d3e1500-128463

+ Details

Name:	us-gaap_BusinessCombinationProvisionalInformationInitialAccountingIncompleteAdjustmentInventory
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 45

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=6388280&loc=d3e13770-109266

+ Details

Name:	us-gaap_Goodwill
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_GoodwillLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of increase (decrease) from adjustments after acquisition date under purchase accounting of an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 10

-Section 25

-Paragraph 16

-URI http://asc.fasb.org/extlink&oid=34752592&loc=d3e961-128460

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 350

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (g)

-URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267

+ Details

Name:	us-gaap_GoodwillPurchaseAccountingAdjustments
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_PrecisiveLlcMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_GranvillePhillipsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_AlterMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Goodwill and Intangible Assets - Goodwill (Parenthetical) (Detail) - USD ($) $ in Thousands	3 Months Ended	9 Months Ended
	Mar. 31, 2014	Sep. 30, 2015	Mar. 17, 2015	Dec. 31, 2014	Sep. 30, 2014	May. 30, 2014	Dec. 31, 2013
Goodwill [Line Items]
Goodwill		$ 199,562		$ 192,381			$ 150,909
Precisive, LLC [Member]
Goodwill [Line Items]
Goodwill		7,042	$ 7,042
Granville-Phillips [Member]
Goodwill [Line Items]
Goodwill					$ 41,612	$ 42,587
Acquisition - Inventory adjustments		$ 975
Alter S.r.l [Member]
Goodwill [Line Items]
Acquisition purchase price	$ 381