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Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Gross Profit to Consolidated Net Income (Detail) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Sep. 30, 2015	Sep. 30, 2014	Sep. 30, 2015	Sep. 30, 2014
Segment Reporting Information [Line Items]
Gross profit	$ 94,229	$ 79,325	$ 290,073	$ 248,332
Research and development	17,217	15,827	51,464	46,866
Selling, general and administrative	33,396	32,365	97,532	99,195
Acquisition costs			30	499
Restructuring	562	1,223	1,569	1,970
Amortization of intangible assets	1,691	1,760	5,071	3,214
Income from operations	41,363	28,150	134,407	96,588
Net interest income	721	394	2,015	860
Income before income taxes	42,084	28,544	136,422	97,448
Provision (benefit) for income taxes	12,315	(573)	39,647	15,862
Net income	29,769	29,117	96,775	81,586
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member]
Segment Reporting Information [Line Items]
Gross profit	76,026	59,285	237,267	186,310
Operating Segments [Member] | Global Service [Member]
Segment Reporting Information [Line Items]
Gross profit	10,498	9,985	30,466	28,065
Operating Segments [Member] | Asia Region Sales [Member]
Segment Reporting Information [Line Items]
Gross profit	7,151	5,021	21,887	20,417
Operating Segments [Member] | Other [Member]
Segment Reporting Information [Line Items]
Gross profit	5,466	7,490	18,005	20,915
Corporate and Eliminations [Member]
Segment Reporting Information [Line Items]
Gross profit	$ (4,912)	$ (2,456)	$ (17,552)	$ (7,375)

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