EX-21.1 4 d60398dex211.htm EX-21.1

EXHIBIT 21.1

SUBSIDIARIES OF THE REGISTRANT

SUBSIDIARY |  |  |  | JURISDICTION OF INCORPORATION
MKS Instruments Italy S.r.l. |  |  |  | Italy
MKS Denmark ApS |  |  |  | Denmark
MKS German Holding GmbH |  |  |  | Germany
MKS Instruments (Asia) Ltd. |  |  |  | Bermuda
MKS Instruments (China) Company Limited |  |  |  | China
MKS Instruments Deutschland GmbH |  |  |  | Germany
MKS Instruments Holdings Ltd |  |  |  | United Kingdom
MKS Instruments (Hong Kong) Limited |  |  |  | Hong Kong
MKS Instruments (Shanghai) Limited |  |  |  | China
MKS Instruments (Singapore) Pte. Ltd. |  |  |  | Singapore
MKS Instruments UK Limited |  |  |  | United Kingdom
MKS Japan, Inc. |  |  |  | Japan
MKS Korea Ltd. |  |  |  | Korea
MKS Luxembourg S.a.r.l. |  |  |  | Luxembourg
MKS International Holdings Limited |  |  |  | United Kingdom
MKS Taiwan Technology Limited |  |  |  | Taiwan
MKS Instruments Israel Ltd. |  |  |  | Israel
MKS Instruments AB |  |  |  | Sweden