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Commitments and Contingencies - Additional Information (Detail) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2015	Dec. 31, 2014	Dec. 31, 2013
Commitments and Contingencies Disclosure [Abstract]
Lease expiration date		2022
Rental expenses under operating leases	$ 7,845	$ 6,909	$ 7,896
Purchase commitments covered by aggregate value	$ 121,820
Purchase commitments	Less than one year

X

- Definition

Lease Expiration Maximum Year

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
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Balance Type:	na
Period Type:	duration

X

- Definition

Majority of MKS purchase commitment arrangement time period/term.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	us-types:durationStringItemType
Balance Type:	na
Period Type:	duration

X

- References

No definition available.

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Rental expense for the reporting period incurred under operating leases, including minimum and any contingent rent expense, net of related sublease income.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 840
-SubTopic 20
-Section 50
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=6453985&loc=d3e41499-112717

+ Details

Name:	us-gaap_OperatingLeasesRentExpenseNet
Namespace Prefix:	us-gaap_
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Balance Type:	debit
Period Type:	duration

X

- Definition

Minimum amount to be expended to satisfy the terms of arrangements in which the entity has agreed to expend funds to procure goods or services, excluding long-term purchase commitments or unconditional purchase obligations.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 944
-SubTopic 210
-Section S99
-Paragraph 1
-Subparagraph (SX 210.7-03.(a)(19))
-URI http://asc.fasb.org/extlink&oid=6879938&loc=d3e572229-122910

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02.25)
-URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 942
-SubTopic 210
-Section S99
-Paragraph 1
-Subparagraph (SX 210.9-03.17)
-URI http://asc.fasb.org/extlink&oid=6876686&loc=d3e534808-122878

Reference 4: http://www.xbrl.org/2003/role/presentationRef
-Publisher SEC
-Name Regulation S-X (SX)
-Number 210
-Section 03
-Paragraph 19
-Article 7

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Balance Type:	credit
Period Type:	instant