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Employee Benefit Plans - Additional Information (Detail) $ in Thousands	12 Months Ended
	Dec. 31, 2015 USD ($) Plan	Dec. 31, 2014 USD ($)	Dec. 31, 2013 USD ($)
Compensation and Retirement Disclosure [Abstract]
Employee contribution to Company's profit sharing plan percentage	1.00%
Employee contribution to Company's profit sharing plan percentage	50.00%
Minimum age limit for specified additional amount	50 years
Employers contribution percentage limit	50.00%
Employees maximum contribution as a percentage of salary	6.00%
Company's contributions	$ 2,667	$ 2,484	$ 2,334
Foreign defined benefit plan | Plan	1
Bonus expense	$ 14,599	14,434	16,006
Supplemental retirement benefits cost	1,704	2,258	$ 4,988
Accumulated benefit obligation	$ 10,645	$ 8,941

X

- Definition

Defined Contribution Plan Minimum Annual Contributions Per Employee Percent

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
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Balance Type:	na
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X

- Definition

Employee bonus expense (includes bonus expense and performance awards).

+ References

No definition available.

+ Details

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Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- Definition

Minimum age limit for specified additional amount.

+ References

No definition available.

+ Details

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Balance Type:	na
Period Type:	duration

X

- Definition

Number of foreign defined benefit pension plans.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Supplemental retirement benefits accumulated benefit obligation.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

X

- Definition

Supplemental retirement benefits cost.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- References

No definition available.

+ Details

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Balance Type:	na
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X

- Definition

Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Percentage employer matches of the employee's percentage contribution matched.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Maximum percentage of employee gross pay the employee may contribute to a defined contribution plan.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
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X

- Definition

The amount of cash or cash equivalents contributed during the reporting period by the entity to fund its pension plans and its non-pension postretirement benefit plans.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 25
-Subparagraph (g)
-URI http://asc.fasb.org/extlink&oid=56944662&loc=d3e3536-108585

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