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Net Income Per Share - Additional Information (Detail) - shares	3 Months Ended
	Mar. 31, 2016	Mar. 31, 2015
Earnings Per Share [Abstract]
Stock options and restricted stock units outstanding	737,000
Number of shares excluded from computation of diluted earnings per share	0	0

X

- Definition

Number of shares outstanding stock options and restricted stock units.

+ References

No definition available.

+ Details

Name:	mksi_NumberOfSharesOutstandingStockOptionsAndRestrictedStockUnits
Namespace Prefix:	mksi_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	instant

X

- Definition

Restricted stock units and stock options excluded from computation of earnings per share amount.

+ References

No definition available.

+ Details

Name:	mksi_RestrictedStockUnitsAndStockOptionsExcludedFromComputationOfEarningsPerShareAmount
Namespace Prefix:	mksi_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

X

- References

No definition available.

+ Details

Name:	us-gaap_EarningsPerShareAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration