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Business Segment, Geographic Area, Product and Significant Customer Information - Additional Information (Detail)	3 Months Ended
	Mar. 31, 2016 Segment Product Customer
Segment Reporting [Abstract]
Number of reportable segments | Segment	4
Number of product groups | Product	3
Number of customers with net revenues greater than 10% of total net revenues | Customer	2
Entity wide net revenue major customer percentage minimum	10.00%

X

- Definition

Entity wide net revenue major customer percentage minimum.

+ References

No definition available.

+ Details

Name:	mksi_EntityWideRevenueMajorCustomerPercentageMinimum
Namespace Prefix:	mksi_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Number of major customers.

+ References

No definition available.

+ Details

Name:	mksi_NumberOfMajorCustomers
Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Number of product groups.

+ References

No definition available.

+ Details

Name:	mksi_NumberOfProductGroups
Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.

+ References

No definition available.

+ Details

Name:	us-gaap_NumberOfReportableSegments
Namespace Prefix:	us-gaap_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

X

- References

No definition available.

+ Details

Name:	us-gaap_SegmentReportingAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration