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Acquisitions - Allocation of Acquired Intangible Assets and Liabilities Related Estimates of Useful Lives (Parenthetical) (Detail) $ in Thousands | Apr. 29, 2016 USD ($)
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Business Combinations [Abstract] |
Favorable leasehold asset | $ 6,428
Unfavorable leasehold liability | $ 4,302

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- Definition Favorable leasehold asset. + References No definition available. + Details
Name: | mksi_FavorableLeaseholdAsset
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Unfavorable leasehold liability. + References No definition available. + Details
Name: | mksi_UnfavorableLeaseholdLiability
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

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- References No definition available. + Details
Name: | us-gaap_BusinessCombinationsAbstract
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration