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Acquisitions - Summary of Purchase Price (Parenthetical) (Detail) | Sep. 30, 2016 $ / shares shares
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Business Combinations [Abstract] |
Business acquisition share price | $ / shares | $ 23.00
Business acquisition number of shares acquired | shares | 39,359,000

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- Definition Business acquisition number of shares acquired. + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

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- Definition Price of a single share of a number of saleable stocks paid or offered to be paid in a business combination. + References No definition available. + Details
Name: | us-gaap_BusinessAcquisitionSharePrice
Namespace Prefix: | us-gaap_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | instant

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- References No definition available. + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration