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Acquisitions - Allocation of Acquired Intangible Assets and Liabilities Related Estimates of Useful Lives (Parenthetical) (Detail) $ in Thousands	Apr. 29, 2016 USD ($)
Business Combinations [Abstract]
Favorable leasehold asset	$ 6,428
Unfavorable leasehold liability	$ 4,302

X

- Definition

Favorable leasehold asset.

+ References

No definition available.

+ Details

Name:	mksi_FavorableLeaseholdAsset
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

X

- Definition

Unfavorable leasehold liability.

+ References

No definition available.

+ Details

Name:	mksi_UnfavorableLeaseholdLiability
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

X

- References

No definition available.

+ Details

Name:	us-gaap_BusinessCombinationsAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration