<SEC-DOCUMENT>0001127602-16-043792-index.html : 20160229
<SEC-HEADER>0001127602-16-043792.hdr.sgml : 20160229
<ACCEPTANCE-DATETIME>20160229133003
ACCESSION NUMBER:		0001127602-16-043792
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20160225
FILED AS OF DATE:		20160229
DATE AS OF CHANGE:		20160229

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Quirk Brian Charles
		CENTRAL INDEX KEY:			0001600515

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		161466335

	MAIL ADDRESS:	
		STREET 1:		C/O MKS INSTRUMENTS, INC.
		STREET 2:		2 TECH DRIVE, SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>form4.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: form4.html

Document 1 - RAW XML: form4.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>doc1.txt
<DESCRIPTION>POWER OF ATTORNEY (PUBLIC): QUIRKBRIANPOA
<TEXT>
Document 2 - file: doc1.txt

</DOCUMENT>
</SEC-DOCUMENT>