<SEC-DOCUMENT>0001127602-16-050990-index.html : 20160504
<SEC-HEADER>0001127602-16-050990.hdr.sgml : 20160504
<ACCEPTANCE-DATETIME>20160504122750
ACCESSION NUMBER:		0001127602-16-050990
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20160502
FILED AS OF DATE:		20160504
DATE AS OF CHANGE:		20160504

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Beecher Gregory R
		CENTRAL INDEX KEY:			0001239380

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		161618257

	MAIL ADDRESS:	
		STREET 1:		C/OTERADYNE INC
		STREET 2:		600 RIVERPARK DRIVE
		CITY:			NORTH READING
		STATE:			MA
		ZIP:			01864

	FORMER NAME:	
		FORMER CONFORMED NAME:	BEECHER GREGORY R
		DATE OF NAME CHANGE:	20030605
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>form4.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: form4.html

Document 1 - RAW XML: form4.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>doc1.txt
<DESCRIPTION>POWER OF ATTORNEY (PUBLIC): BEECHERGREGORYPOA
<TEXT>
Document 2 - file: doc1.txt

</DOCUMENT>
</SEC-DOCUMENT>