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Stock-Based Compensation - Additional Information (Detail) - USD ($) |  | 1 Months Ended | 12 Months Ended
--- | --- | --- | ---
Apr. 29, 2016 | May 31, 2016 | Dec. 31, 2016 | Dec. 31, 2015 | Dec. 31, 2014
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Common stock, shares issued |  |  | 53,672,861 | 53,199,720 |
Common stock reserved for issuance |  |  | 18,000,000 |  |
Vesting period |  |  | 3 years |  |
Number of stock options outstanding |  |  | 0 | 0 |
Number of stock options exercisable |  |  | 0 | 0 |
Tax effect from stock-based plans |  |  | $ 1,254,000 | $ 837,000 | $ 331,000
Capitalization of share based payment costs |  |  | $ 471,000 | $ 471,000 |
Options granted |  |  | 0 | 0 | 0
Total intrinsic value of options exercised |  |  |  | $ 494,000 | $ 958,000
Restricted stock units, weighted average grant date fair value |  |  | $ 8.52 | $ 8.16 | $ 6.37
Employee Stock Option [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Number of stock options outstanding |  |  | 0 |  |
Cash received from employees as a result of employee stock option exercises |  |  |  | $ 592,000 |
Tax effect from stock-based plans |  |  |  | $ 21,000 |
Employee Stock Purchase Plan - Second Amended and Restated [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Shares authorized for issuance |  |  | 400,000 |  |
Percentage of Common Stock through payroll deductions |  |  | 10.00% |  |
Amount of payroll deduction |  |  | $ 21,250 |  |
Percentage of closing price of the Common Stock |  |  | 85.00% |  |
Common stock, shares issued |  |  |  |  | 20,053
Common stock, exercise price |  |  |  |  | $ 24.52
Employee Stock Purchase Plan - Second Amended and Restated [Member] | Offer Terminate [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Percentage of closing price of the Common Stock |  |  | 85.00% |  |
Stock Incentive Plan 2014 [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Common stock reserved for issuance |  |  | 15,306,423 |  |
Shares available for future grant |  |  | 18,000,000 |  |
Percentage of exercise price fair value option grant in period |  |  | 100.00% |  |
Number of shares returned for each common stock |  |  | 2.4 |  |
Stock Incentive Plans 2001 and After [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Percentage of exercise price fair value option grant in period |  |  | 100.00% |  |
Stock options granted to employees under plans prior to 2001, vested per quarter thereafter |  |  | 6.25% |  |
Stock options expired |  |  | 10 years |  |
Stock Incentive Plans 2001 and After [Member] | Share-based Compensation Award, Tranche One [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Stock options granted to employees under plans prior to 2001, vested after one year |  |  | 25.00% |  |
1997 Director Plan [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  | Options granted to directors generally vested at the earliest of (1) one day prior to the next annual meeting, (2) 13 months from the date of grant, or (3) the effective date of an acquisition. |  |
Number of stock options outstanding |  |  | 0 | 0 |
1997 Director Plan [Member] | Minimum [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Vesting period |  |  | 1 day |  |
1997 Director Plan [Member] | Maximum [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Vesting period |  |  | 13 months |  |
2014 ESPP Plan [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Shares authorized for issuance |  |  | 2,500,000 |  |
Percentage of payroll deduction to compensation |  |  | Up to 10% |  |
Percentage of Common Stock through payroll deductions |  |  | 10.00% |  |
Amount of payroll deduction |  |  | $ 21,250 |  |
Percentage of closing price of the Common Stock |  |  | 85.00% |  |
Common stock, shares issued |  |  | 139,079 | 140,531 | 82,481
Common stock, exercise price |  |  |  |  | $ 24.33
Common stock reserved for issuance |  |  | 2,137,909 |  |
2014 ESPP Plan [Member] | Offer Terminate [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Percentage of closing price of the Common Stock |  |  | 85.00% |  |
2014 ESPP Plan [Member] | Minimum [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Common stock, exercise price |  |  | $ 31.40 | $ 30.74 |
2014 ESPP Plan [Member] | Maximum [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Common stock, exercise price |  |  | $ 35.16 | $ 31.34 |
Employee Stock Purchase Plan - Third Amended and Restated [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Shares authorized for issuance |  |  | 1,950,000 |  |
Percentage of payroll deduction to compensation |  |  | Up to 10% |  |
Percentage of Common Stock through payroll deductions |  |  | 10.00% |  |
Amount of payroll deduction |  |  | $ 21,250 |  |
Percentage of closing price of the Common Stock |  |  | 85.00% |  |
Common stock, shares issued |  |  |  |  | 69,474
Common stock, exercise price |  |  |  |  | $ 24.52
Employee Stock Purchase Plan - Third Amended and Restated [Member] | Offer Terminate [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Percentage of closing price of the Common Stock |  |  | 85.00% |  |
Restricted Stock Units (RSUs) [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Shares issued as per merger agreement |  |  | 1,260,525 |  |
Number of RSUs outstanding |  |  | 17,462 |  |
Dividend reinvestment |  |  | 187 |  |
Restricted stock units, weighted average grant date fair value |  |  | $ 35.62 |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  | $ 18,844,000 | $ 12,868,000 | $ 12,106,000
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  | $ 23,446,000 |  |
Estimated weighted average amortization period |  |  | 11 months 5 days |  |
Restricted Stock Units (RSUs) [Member] | Share-based Compensation Award, Tranche One [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Stock options granted to employees under plans prior to 2001, vested after one year |  |  | 33.30% | 33.30% | 33.30%
Restricted Stock Units (RSUs) [Member] | Minimum [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Vesting period |  |  | 1 day |  |
Restricted Stock Units (RSUs) [Member] | Maximum [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Vesting period |  |  | 13 months |  |
Restricted Stock Units (RSUs) [Member] | Newport Deferred Compensation [Member] | Outside Directors [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  | 36,599 |  |
Newport RSUs converted to MKS RSUs at Merger date and released |  | 19,137 |  |  |
RSUs Granted to Employees [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  | Employees who are at least 60 years old and have a minimum of 10 Years of Service (as defined in the applicable RSU agreement) are expensed immediately. |  |
Minimum years of service for RSU |  |  | 10 years |  |
RSUs Granted to Directors [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Share based compensation arrangement by share based payment award vesting period description |  |  | Earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of a change in control of the Company. |  |
Stock Appreciation Rights (SARs) [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  | $ 18,844,000 | $ 12,868,000 | $ 12,106,000
Total compensation expense related to restricted stock unites and stock appreciation rights |  |  | $ 23,446,000 |  |
Estimated weighted average amortization period |  |  | 11 months 5 days |  |
Employee Stock Option [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Total intrinsic value of options, stock appreciation rights exercised and fair value of RSUs vested |  |  | $ 18,844,000 | $ 12,868,000 | $ 12,106,000
Newport [Member] | Restricted Stock Units (RSUs) [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Shares issued as per merger agreement | 360,674 |  |  |  |
Newport [Member] | Stock Appreciation Rights (SARs) [Member] |  |  |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |  |  |
Shares issued as per merger agreement | 899,851 |  |  |  |

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- Definition The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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- Definition Net number of share options (or share units) granted during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(iv)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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