Employee Benefit Plans - Summary of Estimated Benefit Payments for Next 10 Years (Detail) $ in Thousands	Dec. 31, 2016 USD ($)
Defined Benefit Plan, Expected Future Benefit Payments, Fiscal Year Maturity [Abstract]
2017	$ 2,224
2018	2,266
2019	2,949
2020	2,842
2021	3,151
2022-2026	12,554
Estimated benefit payments for next 10 years, total	$ 25,986

Defined benefit plan expected future benefit payments for next ten years.

No definition available.

Name:	mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Defined benefit plan expected future benefit payments year six to ten.

+ References

No definition available.

+ Details

Name:	mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- References

No definition available.

+ Details

Name:	us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of benefits from a defined benefit plan expected to be paid in the next fiscal year following the latest fiscal year. Excludes interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 715
-SubTopic 20
-Section 50
-Paragraph 1
-Subparagraph (f)
-URI http://asc.fasb.org/extlink&oid=65897934&loc=d3e1928-114920

+ Details

Name:	us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of benefits from a defined benefit plan expected to be paid in the fifth fiscal year following the latest fiscal year. Excludes interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.

+ References

+ Details

Name:	us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of benefits from a defined benefit plan expected to be paid in the fourth fiscal year following the latest fiscal year. Excludes interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.

+ References

+ Details

Name:	us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of benefits from a defined benefit plan expected to be paid in the third fiscal year following the latest fiscal year. Excludes interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.

+ References

+ Details

Name:	us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of benefits from a defined benefit plan expected to be paid in the second fiscal year following the latest fiscal year. Excludes interim and annual periods when interim periods are reported on a rolling approach, from latest balance sheet date.

+ References

+ Details

Name:	us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant