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Business Segment, Geographic Area, Product and Significant Customer Information - Worldwide Net Revenue for Each Group of Products (Detail) - USD ($) $ in Thousands	3 Months Ended								12 Months Ended
	Dec. 31, 2016	Sep. 30, 2016	Jun. 30, 2016	Mar. 31, 2016	Dec. 31, 2015	Sep. 30, 2015	Jun. 30, 2015	Mar. 31, 2015	Dec. 31, 2016	Dec. 31, 2015	Dec. 31, 2014
Revenue from External Customer [Line Items]
Net sales from product groups	$ 405,140	$ 380,660	$ 325,861	$ 183,681	$ 172,387	$ 209,332	$ 217,966	$ 213,839	$ 1,295,342	$ 813,524	$ 780,869
Analytical and Control Solutions Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									115,758	102,658	104,189
Materials Delivery Solutions Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									135,989	131,996	126,267
Power Plasma and Reactive Gas Solutions Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									367,665	350,469	335,271
Pressure and Vacuum Measurement Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									252,879	$ 228,401	$ 215,142
Lasers Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									124,432
Optics Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									124,218
Photonics Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups									$ 174,401

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Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 225
-SubTopic 10
-Section S99
-Paragraph 2
-Subparagraph (SX 210.5-03.1)
-URI http://asc.fasb.org/extlink&oid=63488584&loc=d3e20235-122688

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