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Stock Based Compensation - Additional Information (Detail) - USD ($) $ / shares in Units, $ in Thousands |  | 1 Months Ended | 3 Months Ended
--- | --- | --- | ---
Apr. 29, 2016 | May 31, 2016 | Mar. 31, 2017
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Common stock reserved for issuance |  |  | 18,000,000
Total compensation expense related to unvested stock-based awards granted to employees, officers and directors |  |  | $ 23,759
Restricted Stock Units (RSUs) [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Shares issued as per merger agreement |  |  | 1,260,525
Number of RSUs outstanding |  |  | 17,462
Dividend reinvestment |  |  | 234
Restricted stock units, granted |  |  | 171,179
Restricted stock units, weighted average grant date fair value |  |  | $ 66.06
Restricted Stock Units (RSUs) [Member] | Newport Deferred Compensation [Member] | Outside Directors [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Newport RSUs converted to MKS RSUs at Merger date |  |  | 36,599
Newport RSUs converted to MKS RSUs at Merger date and released |  | 19,137 |
Stock Appreciation Rights (SARs) [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Restricted stock units, granted |  |  | 0
Restricted stock units, weighted average grant date fair value |  |  | $ 0
Newport [Member] | Restricted Stock Units (RSUs) [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Shares issued as per merger agreement | 360,674 |  |
Newport [Member] | Stock Appreciation Rights (SARs) [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Shares issued as per merger agreement | 899,851 |  |

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- Definition Share based compensation arrangement by share based payment award equity instruments other than options converted to RSU upon merger. + References No definition available. + Details
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- Definition Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other than Options Converted To RSU Upon Merger And Released + References No definition available. + Details
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- Definition Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other than Options Converted To RSU Upon Merger Remaining To Issue + References No definition available. + Details
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- Definition Share based compensation arrangement by share based payment award equity instruments other than options dividend reinvestment. + References No definition available. + Details
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- Definition Number of shares of equity interests issued or issuable to acquire entity. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 805 -SubTopic 30 -Section 50 -Paragraph 1 -Subparagraph (b)(4) -URI http://asc.fasb.org/extlink&oid=35744584&loc=d3e6927-128479 + Details
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- Definition The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(2)(iii)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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