Gain (loss) from sale or disposal of an organization or integrated set of activities (for example, but not limited to, a partnership or corporation) engaged in providing a product or service in a commercial, industrial, or professional environment.

No definition available.

+ Details

Name:	us-gaap_GainLossOnSaleOfBusiness
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash inflow associated with the amount received from the sale of a portion of the company's business, for example a segment, division, branch or other business, during the period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 12
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=66902209&loc=d3e3179-108585

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Glossary Investing Activities
-URI http://asc.fasb.org/extlink&oid=6516133

+ Details

Name:	us-gaap_ProceedsFromDivestitureOfBusinesses
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 225
-SubTopic 10
-Section S99
-Paragraph 2
-Subparagraph (SX 210.5-03.1)
-URI http://asc.fasb.org/extlink&oid=63488584&loc=d3e20235-122688

+ Details

Name:	us-gaap_SalesRevenueNet
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.

+ References

No definition available.

+ Details

Name:	us-gaap_SubsequentEventLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Details

Name:	us-gaap_StatementBusinessSegmentsAxis=mksi_DataAnalyticsSolutionsBusinessMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_StatementScenarioAxis=us-gaap_ScenarioForecastMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Subsequent Event - Additional Information (Detail) - USD ($) $ in Thousands	1 Months Ended	3 Months Ended			12 Months Ended
	Apr. 30, 2017	Jun. 30, 2017	Mar. 31, 2017	Mar. 31, 2016	Dec. 31, 2016
Subsequent Event [Line Items]
Net revenues			$ 437,153	$ 183,681
Data Analytics Solutions Business [Member]
Subsequent Event [Line Items]
Net revenues					$ 12,700
Subsequent Event [Member]
Subsequent Event [Line Items]
Proceeds from sale of business unit	$ 80,000
Scenario, Forecast [Member]
Subsequent Event [Line Items]
Pre-tax gain		$ 75,000