Business combination compensation expenses.

No definition available.

Name:	mksi_BusinessCombinationCompensationExpenses
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Fair value increase of acquired property plant and equipment.

+ References

No definition available.

+ Details

Name:	mksi_FairValueIncreaseOfAcquiredPropertyPlantAndEquipment
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Fair value write-up of acquired finished goods inventory.

+ References

No definition available.

+ Details

Name:	mksi_FairValueWriteupOfAcquiredFinishedGoodsInventory
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Incremental cost of sales charge.

+ References

No definition available.

+ Details

Name:	mksi_IncrementalCostOfSalesCharge
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SAB Topic 14.F)
-URI http://asc.fasb.org/extlink&oid=27013229&loc=d3e301413-122809

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5047-113901

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 718
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (h)(1)(i)
-URI http://asc.fasb.org/extlink&oid=96867065&loc=d3e5070-113901

+ Details

Name:	us-gaap_AllocatedShareBasedCompensationExpense
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Price of a single share of a number of saleable stocks paid or offered to be paid in a business combination.

+ References

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionSharePrice
Namespace Prefix:	us-gaap_
Data Type:	num:perShareItemType
Balance Type:	na
Period Type:	instant

- Definition

This item represents an other than temporary decline in value that has been recognized against an investment accounted for under the cost method of accounting. The excess of the carrying amount over the fair value of the investment represents the amount of the write down which is or was reflected in earnings. The written down value is a new cost basis with the adjusted value of the investment becoming its new carrying value. Evidence of a loss in value might include, but would not necessarily be limited to, absence of an ability to recover the carrying amount of the investment or inability of the investee to sustain an earnings capacity which would justify the carrying amount of the investment.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 325
-SubTopic 20
-Section 50
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=75025870&loc=d3e40691-111596

+ Details

Name:	us-gaap_CostmethodInvestmentsOtherThanTemporaryImpairment
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Gain (loss) from sale or disposal of an organization or integrated set of activities (for example, but not limited to, a partnership or corporation) engaged in providing a product or service in a commercial, industrial, or professional environment.

+ References

No definition available.

+ Details

Name:	us-gaap_GainLossOnSaleOfBusiness
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash outflow associated with the acquisition of a controlling interest in another entity or an entity that is related to it but not strictly controlled (for example, an unconsolidated subsidiary, affiliate, joint venture or equity method investment).

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 13
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=98514028&loc=d3e3213-108585

+ Details

Name:	us-gaap_PaymentsToAcquireBusinessesAndInterestInAffiliates
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash inflow associated with the amount received from the sale of a portion of the company's business, for example a segment, division, branch or other business, during the period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 12
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=98514028&loc=d3e3179-108585

+ Details

Name:	us-gaap_ProceedsFromDivestitureOfBusinesses
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 225
-SubTopic 10
-Section S99
-Paragraph 2
-Subparagraph (SX 210.5-03.1)
-URI http://asc.fasb.org/extlink&oid=63488584&loc=d3e20235-122688

+ Details

Name:	us-gaap_SalesRevenueNet
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Details

Name:	us-gaap_StatementBusinessSegmentsAxis=mksi_DataAnalyticsSolutionsBusinessMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_StatementEquityComponentsAxis=us-gaap_NoncontrollingInterestMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_NewportCorporationMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Acquisitions and Dispositions - Additional Information (Detail) - USD ($) $ / shares in Units, $ in Thousands	1 Months Ended		3 Months Ended			6 Months Ended		12 Months Ended
	Apr. 30, 2017	Apr. 30, 2016	Jun. 30, 2017	Dec. 31, 2016	Jun. 30, 2016	Jun. 30, 2017	Jun. 30, 2016	Dec. 31, 2016	Apr. 29, 2016
Business Acquisition [Line Items]
Business acquisition share price			$ 23.00			$ 23.00
Stock-based compensation expense			$ 6,207		$ 10,516	$ 14,989	$ 14,668
Total proceeds from sale of business unit, net of cash sold	$ 72,509					72,509
Pre-tax gain	$ 74,856		74,856			74,856
Net revenues			480,757		325,861	917,910	509,542
Data Analytics Solutions Business [Member]
Business Acquisition [Line Items]
Net revenues								$ 12,700
Minority Interest in Private Company [Member]
Business Acquisition [Line Items]
Investments in minority interest		$ 9,300
Impairment charges				$ 5,000				$ 5,000
Newport [Member]
Business Acquisition [Line Items]
Business acquisition share price									$ 23.00
Fair value write-up of acquired finished goods inventory			15,090			15,090
Incremental cost of sales charge					10,119		10,119
Fair value write-up of acquired property, plant and equipment			$ 36,242			$ 36,242
Compensation expense					6,631		6,631
Stock-based compensation expense					$ 3,334		$ 3,334