<SEC-DOCUMENT>0001193125-17-187151-index.html : 20170530
<SEC-HEADER>0001193125-17-187151.hdr.sgml : 20170529
<ACCEPTANCE-DATETIME>20170530145533
ACCESSION NUMBER:		0001193125-17-187151
CONFORMED SUBMISSION TYPE:	SD
PUBLIC DOCUMENT COUNT:		29
<RULE>
<RULE-NAME>13p-1
<ITEM>
<ITEM-NUMBER>1.01
<ITEM-PERIOD>20161231
</ITEM>
<ITEM>
<ITEM-NUMBER>1.02
<ITEM-PERIOD>20161231
</ITEM>
</RULE>
FILED AS OF DATE:		20170530
DATE AS OF CHANGE:		20170530

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			MKS INSTRUMENTS INC
		CENTRAL INDEX KEY:			0001049502
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				042277512
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SD
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-23621
		FILM NUMBER:		17876974

	BUSINESS ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
		BUSINESS PHONE:		978-645-5500

	MAIL ADDRESS:	
		STREET 1:		2 TECH DRIVE
		STREET 2:		SUITE 201
		CITY:			ANDOVER
		STATE:			MA
		ZIP:			01810
</SEC-HEADER>
<DOCUMENT>
<TYPE>SD
<SEQUENCE>1
<FILENAME>d387878dsd.htm
<DESCRIPTION>SD
<TEXT>
Document 1 - file: d387878dsd.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-1.01
<SEQUENCE>2
<FILENAME>d387878dex101.htm
<DESCRIPTION>EX-1.01
<TEXT>
Document 2 - file: d387878dex101.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g387878011a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: g387878011a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>g387878011b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: g387878011b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>g387878017a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: g387878017a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g387878017b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: g387878017b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>g387878017c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: g387878017c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>g387878017d.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: g387878017d.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>g387878018a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: g387878018a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>g387878018b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: g387878018b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>g387878018c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 11 - file: g387878018c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>g387878018d.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: g387878018d.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>13
<FILENAME>g387878019a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: g387878019a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>14
<FILENAME>g387878019b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 14 - file: g387878019b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>15
<FILENAME>g387878019c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 15 - file: g387878019c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>16
<FILENAME>g387878020.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 16 - file: g387878020.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>17
<FILENAME>g387878023a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 17 - file: g387878023a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>18
<FILENAME>g387878023b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 18 - file: g387878023b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>19
<FILENAME>g387878032a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 19 - file: g387878032a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>20
<FILENAME>g387878032b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 20 - file: g387878032b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>21
<FILENAME>g387878032c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 21 - file: g387878032c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>22
<FILENAME>g387878032d.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 22 - file: g387878032d.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>23
<FILENAME>g387878032e.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 23 - file: g387878032e.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>24
<FILENAME>g387878035a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 24 - file: g387878035a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>25
<FILENAME>g387878035b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 25 - file: g387878035b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>26
<FILENAME>g387878035c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 26 - file: g387878035c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>27
<FILENAME>g387878036a.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 27 - file: g387878036a.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>28
<FILENAME>g387878036b.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 28 - file: g387878036b.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>29
<FILENAME>g387878036c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 29 - file: g387878036c.jpg

</DOCUMENT>
</SEC-DOCUMENT>